ULTRATECH INC Patent Applications Pending
42 applications still open at the USPTO, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2018-01-23: Application PCTUS2018014840; Invention Chuck Systems and Methods Having Enhanced Electrical Isolation For Substrate-Biased ALD; Applicant ULTRATECH, INC.; Status RO PROCESSING COMPLETED-PLACED IN STORAGE.
- 2018-01-16: Application PCTUS2018013782; Invention METHODS OF FORMING MLD FILMS USING POLYOLS WITH LONG CARBON BACKBONES; Applicant ULTRATECH, INC.; Status RO PROCESSING COMPLETED-PLACED IN STORAGE.
- 2017-07-28: Application 62538412; Invention Laser-Based Systems And Methods For Melt-Processing of Metal Layers in Semiconductor Manufacturing; Applicant Ultratech, Inc.; Status Provisional Application Expired.
- 2017-04-21: Application 62488072; Invention METHODS OF FORMING SOURCES AND DRAINS FOR FINFETS USING SOLID PHASE EPITAXY WITH LASER ANNEALING; Applicant Ultratech, Inc.; Status Provisional Application Expired.
| Filed | Application | Invention | Applicant | Status | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|
| 2018-01-23 | PCTUS2018014840 | Chuck Systems and Methods Having Enhanced Electrical Isolation For Substrate-Biased ALD | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | MICHAEL J. SERSHEN ADAM BERTUCH | United States United States | ||
| 2018-01-16 | PCTUS2018013782 | METHODS OF FORMING MLD FILMS USING POLYOLS WITH LONG CARBON BACKBONES | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | MARK J. SOWA | United States | ||
| 2017-07-28 | 62538412 | Laser-Based Systems And Methods For Melt-Processing of Metal Layers in Semiconductor Manufacturing | Ultratech, Inc. | Provisional Application Expired | Serguei Anikitchev Andrew M. Hawryluk | United States United States | ||
| 2017-04-21 | 62488072 | METHODS OF FORMING SOURCES AND DRAINS FOR FINFETS USING SOLID PHASE EPITAXY WITH LASER ANNEALING | Ultratech, Inc. | Provisional Application Expired | Michael H. Willemann | United States | ||
| 2017-02-03 | 62454088 | METHODS OF FORMING PRODUCT WAFERS HAVING SEMICONDUCTOR LIGHT-EMITTING DEVICES TO IMPROVE EMISSION WAVELENGTH UNIFORMITY | Ultratech, Inc. | Provisional Application Expired | Andrew M. Hawryluk | United States | ||
| 2017-01-27 | 62451377 | Chuck systems and methods with enhanced electrical isolation for substrate-biased ALD | Ultratech, Inc. | Provisional Application Expired | Michael J. Sershen Adam Bertuch | United States United States | ||
| 2017-01-16 | 62446708 | Methods of forming MLD films using polyols with long carbon backbones | Ultratech, Inc. | Provisional Application Expired | Mark J. Sowa | United States | ||
| 2016-12-08 | 62431790 | Wafer chuck with contractable sealing devices for securing warped wafers | Ultratech, Inc. | Provisional Application Expired | Raymond Ellis A.J. Crespin Konrad Heinle Charles Hu | United States United States United States United States | ||
| 2016-12-08 | 62431683 | Scanning methods for focus control for lithographic processing of reconstituted wafers | Ultratech, Inc. | Provisional Application Expired | Paul M. Bischoff Emily M. True Raymond Ellis A.J. Crespin | United States United States United States United States | ||
| 2016-11-02 | 62416262 | Wafer chuck apparatus with micro-channel regions | Ultratech, Inc. | Provisional Application Expired | Raymond Ellis A.J. Crespin | United States United States | ||
| 2016-03-08 | 62304968 | QUARTZ CRYSTAL MICROBALANCE ASSEMBLY FOR ALD SYSTEMS | Ultratech, Inc. | Provisional Application Expired | Laurent Lecordier Michael Ruffo | United States United States | ||
| 2016-02-22 | 62298402 | PE-ALD METHODS WITH REDUCED QUARTZ-BASED CONTAMINATION | Ultratech, Inc. | Provisional Application Expired | Mark J. Sowa Adam Bertuch Ritwick Bhatia | United States United States United States | ||
| 2015-12-18 | 62269301 | Full-wafer inspection methods having selectable pixel density | Ultratech, Inc. | Provisional Application Expired | David M. Owen Byoung-Ho LEE Eric Bouche Andrew M. Hawryluk | United States United States United States United States | ||
| 2015-12-07 | 62263917 | Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry | Ultratech, Inc. | Provisional Application Expired | David M. Owen | United States | ||
| 2015-10-21 | 62244467 | Methods of forming an ALD-inhibiting layer using a self-assembled monolayer | Ultratech, Inc. | Provisional Application Expired | Laurent Lecordier | United States | ||
| 2015-09-28 | 62233575 | High-Throughput multichamber atomic layer deposition systems and methods | Ultratech, Inc. | Provisional Application Expired | Andrew M. Hawryluk | United States | ||
| 2015-09-15 | 62218734 | Laser-assisted atomic layer deposition of 2D metal chalcogenide films | Ultratech, Inc. | Provisional Application Expired | Ganesh Sundaram | United States | ||
| 2015-08-31 | 62212021 | Plasma-enhanced atomic layer deposition system with rotary reactor tube | Ultratech, Inc. | Provisional Application Expired | Arthur W. Zafiropoulo Andrew M. Hawryluk | United States United States | ||
| 2015-07-22 | 62195349 | HIGH-EFFICIENCY LINE-FORMING OPTICAL SYSTEMS AND METHODS USING A SERRATED SPATIAL FILTER | Ultratech, Inc. | Provisional Application Expired | Serguei Anikitchev | United States | ||
| 2015-07-20 | 62194426 | Masking methods for ALD processes for electrode-based devices | Ultratech, Inc. | Provisional Application Expired | Ritwik Bhatia | United States | ||
| 2015-06-15 | 62175492 | Polarization-based coherent gradient sensing systems and methods | Ultratech, Inc. | Provisional Application Expired | David G. Stites | United States | ||
| 2015-06-08 | 62172701 | Microchamber laser processing systems and methods using localized process-gas atmosphere | Ultratech, Inc. | Provisional Application Expired | James McWhirter | United States | ||
| 2015-03-20 | 62136011 | Systems and methods for reducing pulsed laser beam profile non-uniformities for laser annealing | Ultratech, Inc. | Provisional Application Expired | Yun WANG | United States | ||
| 2015-01-22 | PCTUS2015012476 | VAPOR DELIVERY SYSTEM | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | MICHAEL RUFFO ADAM BERTUCH | United States United States | ||
| 2014-11-21 | PCTUS2014066916 | IMPROVED PLASMA ENHANCED ALD SYSTEM | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | MICHAEL SERSHEN ROBERT KANE MARK SOWA | United States United States United States | ||
| 2014-09-17 | PCTUS2014056172 | METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAYERS ON SILICON SUBSTRATES | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | GANESH SUNDARAM DANIEL STEARNS ANDREW M. HAWRYLUK | United States United States United States | ||
| 2014-08-27 | PCTUS2014053015 | IMPROVED THROUGH SILICON VIA | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | MARK SOWA | United States | ||
| 2014-06-25 | PCTUS2014044076 | FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING TO REMOVE LATTICE DISLOCATIONS | ULTRATECH, INC | RO PROCESSING COMPLETED-PLACED IN STORAGE | ANDREW M. HAWRYLUK RITWIK BHATIA GANESH SUNDARAM | United States United States United States | ||
| 2014-06-02 | PCTUS2014040557 | GAS DEPOSITION HEAD FOR SPATIAL ALD | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | LAURENT LECORDIER MICHAEL J. SERSHEN | United States United States | ||
| 2014-01-23 | 61930870 | VAPOR DELIVERY SYSTEM | Ultratech, Inc. | Provisional Application Expired | Adam Bertuch Michael Ruffo | United States United States | ||
| 2008-11-03 | PCTUS2008012423 | MINIMIZATION OF SURFACE REFLECTIVITY VARIATIONS | ULTRATECH, INC | RO PROCESSING COMPLETED-PLACED IN STORAGE | ANDREW M. HAWRYLUK | United States | YOUNG, LEE W | |
| 2008-04-07 | PCTUS2008004496 | METHODS OF FORMING A DENUDED ZONE IN A SEMICONDUCTOR WAFER USING RAPID LASER ANNEALING | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ISRAEL BEINGLASS | United States | YOUNG, LEE W | |
| 2007-03-09 | PCTUS2007006085 | DETERMINATION OF LITHOGRAPHIC MISALIGNMENT BASED ON CURVATURE AND STRESS MAPPING DATA OF SUBSTRATES | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | DAVID OWEN | United States | CONNOLLY, PATRICK J | |
| 2006-05-16 | PCTUS2006019022 | METHODS AND APPARATUS FOR REMOTE TEMPERATURE MEASUREMENT OF A SPECULAR SURFACE | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | DAVID A. MARKLE | United States | YOUNG, LEE W | |
| 2005-10-27 | PCTUS2005038777 | APOCHROMATIC UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ROMEO I. MERCADO | United States | HOPPE, SHARON S | |
| 2005-04-27 | PCTUS2005014456 | LASER THERMAL PROCESSING WITH LASER DIODE RADIATION | ULTRATECH, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | DAVID A. MARKLE SOMIT TALWAR | United States United States | THOMAS, DEBORAH A | |
| 2005-03-24 | PCTUS2005009694 | BEAMSPLITTER FOR HIGH-POWER RADIATION | ULTRATECH, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | IGOR LANDAU | United States | EVANS, GEOFFREY S | |
| 2005-02-18 | PCTUS2005005277 | SILICON LAYER FOR UNIFORMIZING TEMPERATURE DURING PHOTO-ANNEALING | ULTRATECH, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | MICHAEL O. THOMPSON SOMIT TALWAR | United States United States | RALIS, STEPHEN J | |
| 2004-09-28 | PCTUS2004031783 | LASER THERMAL ANNEALING OF LIGHTLY DOPED SILICON SUBSTRATES | ULTRATECH, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | SOMIT TALWAR MICHAEL O. THOMPSON DAVID A. MARKLE BORIS GREK | United States United States United States United States | NGUYEN, TUAN H | |
| 2004-08-31 | PCTUS2004028389 | LASER THERMAL PROCESSING WITH LASER DIODE RADIATION | ULTRATECH, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | DAVID A. MARKLE SOMIT TALWAR | United States United States | ELVE, MARIA ALEXANDRA | |
| 2004-05-24 | PCTUS2004016389 | DEEP ULTRAVIOLET UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS | ULTRATECH, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | SHIYU ZHANG ROMEO I. MERCADO | United States United States | CRUZ, MAGDA | |
| 2004-04-16 | PCTUS2004011778 | APPARATUS AND METHODS FOR THERMAL REDUCTION OF OPTICAL DISTORTION | ULTRATECH, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | DAVID A. MARKLE | United States | RAIZEN, DEBORAH A |