ULTRATECH INC Expired Patents
31 granted patents the USPTO lists as expired; the status gives the reason, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2018-04-02: Application 15943115; Invention Method and Apparatus for Forming Device Quality Gallium Nitride Layers on Silicon Substrates; Applicant Ultratech, Inc.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
- 2017-05-18: Application 15598763; Invention FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING TO REMOVE LATTICE DISLOCATIONS; Applicant Ultratech, Inc.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
- 2017-05-17: Application 15597680; Invention FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING TO REMOVE LATTICE DISLOCATIONS; Applicant Ultratech, Inc.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
- 2017-03-13: Application 15457460; Invention METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAYERS ON SILICON SUBSTRATES; Applicant Ultratech, Inc.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
| Filed | Application | Invention | Applicant | Status | Granted | Patent | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|---|---|
| 2018-04-02 | 15943115 | Method and Apparatus for Forming Device Quality Gallium Nitride Layers on Silicon Substrates | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2019-04-02 | 10249491 | US20180226241A1 | Ganesh Sundaram Andrew M. Hawryluk Daniel Stearns | United States United States United States | MANDALA, VICTOR A |
| 2017-05-18 | 15598763 | FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING TO REMOVE LATTICE DISLOCATIONS | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2018-10-02 | 10090153 | US20170256394A1 | Andrew M. Hawryluk Ganesh Sundaram Ritwik Bhatia | United States United States United States | PARKER, JOHN M |
| 2017-05-17 | 15597680 | FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING TO REMOVE LATTICE DISLOCATIONS | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2018-03-27 | 9929011 | US20170250070A1 | Andrew M. Hawryluk Ganesh Sundaram Ritwik Bhatia | United States United States United States | PARKER, JOHN M |
| 2017-03-13 | 15457460 | METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAYERS ON SILICON SUBSTRATES | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2018-05-01 | 9960036 | US20170213718A1 | Ganesh Sundaram Andrew M. Hawryluk Daniel Stearns | United States United States United States | MANDALA, VICTOR A |
| 2017-02-20 | 15437055 | High-efficiency line-forming optical systems and methods for defect annealing and dopant activation | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-07-18 | 9711361 | US20170162392A1 | Andrew M. Hawryluk Serguei Anikitchev | United States United States | PRASAD, NEIL R |
| 2016-10-17 | 15295813 | Methods of forming an ALD-inhibiting layer using a self-assembled monolayer | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2019-06-11 | 10316406 | US20170114451A1 | Laurent Lecordier | United States | TUROCY, DAVID P |
| 2016-08-13 | 15236430 | SILICON GERMANIUM HETEROJUNCTION BIPOLAR TRANSISTOR STRUCTURE AND METHOD | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2018-07-24 | 10032883 | US20160351682A1 | Oleg Gluschenkov Rajendran Krishnasamy Kathryn T. Schonenberg | United States United States United States | LI, MEIYA |
| 2016-07-14 | 15210095 | Masking methods for ALD processes for electrode-based devices | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-04-25 | 9633850 | US20170025272A1 | Ritwik Bhatia | United States | SARKAR, ASOK K |
| 2016-06-24 | 15191941 | HIGH-EFFICIENCY LINE-FORMING OPTICAL SYSTEMS AND METHODS | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-05-02 | 9638922 | US20160306177A1 | Serguei Anikitchev | United States | SMOOT, STEPHEN W |
| 2016-04-28 | 15033071 | PLASMA ENHANCED ALD SYSTEM | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2019-07-16 | 10351950 | US20160281223A1 | Mark Sowa Robert Kane Michael Sershen | United States United States United States | GAMBETTA, KELLY M |
| 2016-03-09 | 15064634 | Systems and methods for reducing pulsed laser beam profile non-uniformities for laser annealing | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2018-07-10 | 10016843 | US20160276184A1 | Yun Wang | United States | EVERHART, CARIDAD |
| 2016-01-29 | 14909004 | METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAYERS ON SILICON SUBSTRATES | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-05-30 | 9666432 | US20160203972A1 | Ganesh Sundaram Andrew M. Hawryluk Daniel Stearns | United States United States United States | MANDALA, VICTOR A |
| 2015-12-17 | 14899552 | FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING TO REMOVE LATTICE DISLOCATIONS | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-09-19 | 9768016 | US20160155629A1 | Andrew M. Hawryluk Ganesh Sundaram Ritwik Bhatia | United States United States United States | PARKER, JOHN M |
| 2015-12-02 | 14957273 | Atomic Layer Deposition Head | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-10-10 | 9783888 | US20160115596A1 | Michael J. Sershen Ganesh M. Sundaram Roger R. Coutu Jill Svenja Becker Mark J. Dalberth | United States United States United States United States United States | TADESSE, YEWEBDAR T |
| 2015-06-19 | 14744409 | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2016-04-19 | 9318319 | US20160064208A1 | Arthur W. Zafiropoulo Mark J. Sowa | United States United States | SMITH, BRADLEY |
| 2015-05-18 | 14714544 | Method of laser annealing a semiconductor wafer with localized control of ambient oxygen | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-04-04 | 9613828 | US20160343583A1 | James McWhirter Arthur W. Zafiropoulo | United States United States | MARUF, SHEIKH |
| 2015-01-21 | 14601944 | OXYGEN RADICAL ENHANCED ATOMIC-LAYER DEPOSITION USING OZONE PLASMA | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-02-28 | 9583337 | US20150279665A1 | Arthur W. Zafiropoulo | United States | CHEN, BRET P |
| 2014-12-29 | 14584034 | METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPOSITION WITH SUBSTRATE AND COATING HEAD SEPARATION DISTANCE IN THE MILLIMETER RANGE | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2017-02-14 | 9567670 | US20150275363A1 | Michael J. Sershen Ganesh M. Sundaram Roger R. Coutu Jill Svenja Becker Mark J. Dalberth | United States United States United States United States United States | TADESSE, YEWEBDAR T |
| 2014-09-25 | 14497006 | LASER SPIKE ANNEALING USING FIBER LASERS | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2016-05-17 | 9343307 | US20150179449A1 | Serguei Anikitchev | United States | LUU, CHUONG A |
| 2014-04-15 | 14253570 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2016-07-26 | 9401278 | US20140227890A1 | Andrew M. Hawryluk Boris Grek David A. Markle | United States United States United States | MENZ, LAURA MARY |
| 2013-10-04 | 14046414 | THROUGH SILICON VIA AND METHOD OF FABRICATING SAME | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2014-05-27 | 8735251 | US20140094007A1 | Paul Stephen Andry Edmund Juris Sprogis Cornelia Kang-I Tsang | United States United States United States | NGO, NGAN V |
| 2013-08-07 | 13961655 | Methods of laser processing photoresist in a gaseous environment | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2015-03-24 | 8986562 | US20150041431A1 | Arthur W. Zafiropoulo Andrew M. Hawryluk | United States United States | CULBERT, ROBERTS P |
| 2013-07-29 | 13953423 | SYSTEMS AND METHODS FOR MEASURING HIGH-INTENSITY LIGHT BEAMS | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2015-03-24 | 8988674 | US20150029497A1 | Serguei Anikitchev David Gaines | United States United States | STAFIRA, MICHAEL PATRICK |
| 2013-07-02 | 13933355 | Betavoltaic power sources for transportation applications | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2016-02-23 | 9266437 | US20140021826A1 | Arthur W. Zafiropoulo Andrew M. Hawryluk | United States United States | NGUYEN, TRAN N |
| 2013-06-07 | 13913045 | SUBSTRATE PROCESSING WITH REDUCED WARPAGE AND/ | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2016-07-26 | 9401277 | US20130273751A1 | Yun Wang Shaoyin Chen | United States United States | LIU, XUE H |
| 2013-05-20 | 13897514 | Unit magnification large-format catadioptric lens for microlithography | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2014-09-09 | 8830590 | US20130321935A1 | David G. Stites | United States | LESTER, EVELYN A |
| 2013-04-15 | 13863283 | Betavoltaic power sources for mobile device applications | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2014-10-28 | 8872408 | US20130278109A1 | Arthur W. Zafiropoulo Andrew M. Hawryluk | United States United States | PERT, EVAN T |
| 2013-03-28 | 13852013 | SILICON GERMANIUM HETEROJUNCTION BIPOLAR TRANSISTOR STRUCTURE AND METHOD | Ultratech, Inc | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2016-09-20 | 9450069 | US20130210210A1 | Oleg Gluschenkov Rajendran Krishnasamy Kathryn T. Schonenberg | United States United States United States | LI, MEIYA |
| 2013-01-08 | 13736627 | UNDERFILL FLOW GUIDE STRUCTURES AND METHOD OF USING SAME | Ultratech, Inc. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2013-11-12 | 8580673 | US20130122661A1 | Timothy H. Daubenspeck Jeffrey P. Gambino Christopher D. Muzzy Marie-Claude Paquet Wolfgang Sauter Timothy D. Sullivan | United States United States United States Canada United States United States | HUYNH, ANDY |
| 2012-12-20 | 13723090 | SOLDER INTERCONNECT PADS WITH CURRENT SPREADING LAYERS | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2014-03-11 | 8669660 | US20130105971A1 | Timothy H. Daubenspeck Timothy D. Sullivan | United States United States | TANG, SUIAN |
| 2012-12-06 | 13706397 | DUAL-LOOP CONTROL FOR LASER ANNEALING OF SEMICONDUCTOR WAFERS | ULTRATECH, INC. | Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 | 2014-04-08 | 8691598 | James T. McWhirter David Gaines Joseph Lee Pailo Zambon | United States United States United States United States | GHEYAS, SYED I |