ULTRATECH INC Active Patents
13 granted patents the USPTO still lists as patented, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2017-12-07: Application 15834614; Invention SCANNING METHODS FOR FOCUS CONTROL FOR LITHOGRAPHIC PROCESSING OF RECONSTITUTED WAFERS; Applicant Ultratech, Inc.; Status Patented Case.
- 2017-10-11: Application 15729877; Invention Wafer Chuck Apparatus With Micro-Channel Regions; Applicant Ultratech, Inc.; Status Patented Case.
- 2016-11-29: Application 15362923; Invention Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry; Applicant Ultratech, Inc.; Status Patented Case.
- 2016-07-14: Application 15210399; Invention High-efficiency line-forming optical systems and methods using a serrated spatial filter; Applicant Ultratech, Inc.; Status Patented Case.
| Filed | Application | Invention | Applicant | Status | Granted | Patent | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|---|---|
| 2017-12-07 | 15834614 | SCANNING METHODS FOR FOCUS CONTROL FOR LITHOGRAPHIC PROCESSING OF RECONSTITUTED WAFERS | Ultratech, Inc. | Patented Case | 2019-04-23 | 10269662 | US20180166348A1 | Paul M. Bischoff Emily M. True Raymond Ellis A.J. Crespin | United States United States United States United States | SINGAL, ANKUSH K |
| 2017-10-11 | 15729877 | Wafer Chuck Apparatus With Micro-Channel Regions | Ultratech, Inc. | Patented Case | 2019-11-05 | 10468290 | US20180122681A1 | Raymond Ellis A.J. Crespin | United States United States | GATES, ERIC ANDREW |
| 2016-11-29 | 15362923 | Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry | Ultratech, Inc. | Patented Case | 2018-04-03 | 9935022 | US20170162456A1 | David M. Owen | United States | TRAN, THANH Y |
| 2016-07-14 | 15210399 | High-efficiency line-forming optical systems and methods using a serrated spatial filter | Ultratech, Inc. | Patented Case | 2019-07-16 | 10353208 | US20170025287A1 | Serguei Anikitchev | United States | EVANS, GEOFFREY S |
| 2016-05-12 | 15152907 | POLARIZATION-BASED COHERENT GRADIENT SENSING SYSTEMS AND METHODS | Ultratech, Inc. | Patented Case | 2017-10-10 | 9784570 | US20160363440A1 | David G. Stites | United States | LEE, HWA S |
| 2015-11-16 | 14941712 | LASER ANNEALING SYSTEMS AND METHODS WITH ULTRA-SHORT DWELL TIMES | Ultratech, Inc. | Patented Case | 2018-09-25 | 10083843 | US20160181120A1 | Andrew M. Hawryluk Serguei Anikitchev | United States United States | EVANS, GEOFFREY S |
| 2015-10-30 | 14929186 | HIGH-EFFICIENCY LINE-FORMING OPTICAL SYSTEMS AND METHODS FOR DEFECT ANNEALING AND DOPANT ACTIVATION | Ultratech, Inc. | Patented Case | 2017-04-04 | 9613815 | US20160148810A1 | Andrew M. Hawryluk Serguei Anikitchev | United States United States | PRASAD, NEIL R |
| 2015-06-19 | 14744207 | High-efficiency line-forming optical systems and methods | Ultratech, Inc. | Patented Case | 2016-08-09 | 9411163 | US20160033773A1 | Serguei Anikitchev | United States | SMOOT, STEPHEN W |
| 2014-09-18 | 14490446 | LASER ANNEALING SYSTEMS AND METHODS WITH ULTRA-SHORT DWELL TIMES | Ultratech, Inc. | Patented Case | 2017-01-31 | 9558973 | US20160086832A1 | Andrew M. Hawryluk Serguei Anikitchev | United States United States | HEINRICH, SAMUEL M |
| 2014-07-26 | 14341777 | Wynne-Dyson optical system with variable magnification | Ultratech, Inc. | Patented Case | 2016-11-08 | 9488811 | US20150055228A1 | David G. Stites | United States | SAHLE, MAHIDERE S |
| 2014-06-23 | 14311747 | Systems and methods for reducing beam instability in laser annealing | Ultratech, Inc. | Patented Case | 2017-01-31 | 9559023 | US20150371911A1 | James T. McWhirter Andrew Hawryluk Serguei Anikitichev Masoud Safa | United States United States United States United States | GALVIN III, JOSEPH M |
| 2014-05-19 | 14281291 | Wynne-Dyson projection lens with reduced susceptibility to UV damage | Ultratech, Inc. | Patented Case | 2016-09-06 | 9436103 | US20150331326A1 | Peiqian Zhao Emily M. True Raymond Ellis Andrew M. Hawryluk | United States United States United States United States | WHITESELL, STEVEN H |
| 2013-06-04 | 13909542 | LASER ANNEALING SYSTEMS AND METHODS WITH ULTRA-SHORT DWELL TIMES | Ultratech, Inc. | Patented Case | 2014-10-21 | 8865603 | US20130330844A1 | Andrew M. Hawryluk Serguei Anikitchev | United States United States | HILLMAN, DAMIAN A |