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AXCELIS TECHNOLOGIES INC (ACLS) Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions

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AXCELIS TECHNOLOGIES INC Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions

AXCELIS TECHNOLOGIES INC (ACLS) reported Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions of $295.00 thousand for the 12-month period ending 2025-12-31, per its 10-K filed 2026-02-26.

Financial Statements › Notes › Income Taxes › Income Tax Uncertainties

us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions · last filed 2026-02-26

  • AXCELIS TECHNOLOGIES INC unrecognized tax benefits, decrease resulting from prior period tax positions for fiscal 2025 was $295.00K, a 10.61% decline from fiscal 2024.
  • AXCELIS TECHNOLOGIES INC unrecognized tax benefits, decrease resulting from prior period tax positions for fiscal 2024 was $330.00K, a 21.77% increase from fiscal 2023.
  • AXCELIS TECHNOLOGIES INC unrecognized tax benefits, decrease resulting from prior period tax positions for fiscal 2023 was $271.00K, a 122.13% increase from fiscal 2022.
  • AXCELIS TECHNOLOGIES INC unrecognized tax benefits, decrease resulting from prior period tax positions for fiscal 2022 was $122.00K, a 77.66% decline from fiscal 2021.
Period endUnrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions 12 month
2025-12-31$295.00K
10-K · filed 2026-02-26
2024-12-31$330.00K
10-K · filed 2026-02-26
2023-12-31$271.00K
10-K · filed 2026-02-26
2022-12-31$122.00K
10-K · filed 2025-02-28
2021-12-31$546.00K
10-K/A · filed 2024-02-28
2020-12-31$502.00K
10-K · filed 2023-02-24
2018-12-31$132.00K
10-K · filed 2021-02-26
2015-12-31$78.00K
10-K · filed 2018-03-14

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