AXCELIS TECHNOLOGIES INC Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number
AXCELIS TECHNOLOGIES INC (ACLS) had Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of 1.09 million shares as of 2020-12-31, per its 10-K filed 2021-02-26.
Discontinued › Notes › Compensation Related Costs › Share-Based Payment Arrangement, Disclosure
us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber · last filed 2021-02-26
- 2020-12-31: Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number 1.09M shares.
- 2019-12-31: Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number 1.12M shares.
- 2018-12-31: Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number 820.00K shares; Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number as first filed 820.00 shares.
- 2017-12-31: Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number 617.00 shares.
| Period end | Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number | Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number as first filed |
|---|---|---|
| 2020-12-31 | 1.09M shares 10-K · filed 2021-02-26 | |
| 2019-12-31 | 1.12M shares 10-K · filed 2021-02-26 | |
| 2018-12-31 | 820.00K shares 10-K · filed 2020-03-02 | 820.00 shares 10-K · filed 2019-03-11 |
| 2017-12-31 | 617.00 shares 10-K · filed 2019-03-11 |
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