MATTSON TECHNOLOGY INC Patent Applications Rejected
6 applications abandoned without a patent; the status gives the reason, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2025-03-24: Application 19088074; Invention PLASMA PROCESSING APPARATUS; Applicant Mattson Technology, Inc.; Status Abandoned -- Incomplete Application (Pre-examination).
- 2022-11-28: Application 17994985; Invention Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus; Applicant Mattson Technology, Inc.; Status Abandoned -- Failure to Respond to an Office Action.
- 2022-03-28: Application 17706090; Invention Processing of Semiconductors Using Vaporized Solvents; Applicant Mattson Technology, Inc.; Status Abandoned -- Failure to Respond to an Office Action.
- 2022-02-14: Application 17670819; Invention Systems And Methods For Workpiece Processing Using Neutral Atom Beams; Applicant Mattson Technology, Inc.; Status Abandoned -- Failure to Respond to an Office Action.
| Filed | Application | Invention | Applicant | Status | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|
| 2025-03-24 | 19088074 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Abandoned -- Incomplete Application (Pre-examination) | US20250308861A1 | Jianpin Zheng Saikumar Kodumuri Adrian Tan Subrahmanyam Venkata Rama Kommisetti Michael Vanabbema Ludovic Goffart Sim Darius | Singapore Singapore Singapore Singapore Singapore Singapore Singapore | |
| 2022-11-28 | 17994985 | Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Abandoned -- Failure to Respond to an Office Action | US20230091035A1 | Martin L. Zucker Peter J. Lembesis Ted Tevis Ryan M. Pakulski Michael X. Yang | United States United States United States United States United States | FORD, NATHAN K |
| 2022-03-28 | 17706090 | Processing of Semiconductors Using Vaporized Solvents | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology, Co., LTD | Abandoned -- Failure to Respond to an Office Action | US20220223405A1 | Shuang Meng Shawming Ma Michael X. Yang | United States United States United States | COLEMAN, RYAN L |
| 2022-02-14 | 17670819 | Systems And Methods For Workpiece Processing Using Neutral Atom Beams | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Abandoned -- Failure to Respond to an Office Action | US20220165614A1 | Stephen E. Savas | United States | CHEN, KEATH T |
| 2021-08-27 | 17459070 | Surface Smoothing of Workpieces | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology, Co., LTD | Abandoned -- Failure to Respond to an Office Action | US20210391185A1 | Qi Zhang Xinliang Lu Hua Chung | United States United States United States | REYES, JOSHUA NATHANIEL PI |
| 2019-08-12 | 16537748 | Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing | Mattson Technology, Inc. | Abandoned -- Incomplete Application (Pre-examination) | Stephen E. Savas Shawming Ma | United States United States |