MATTSON TECHNOLOGY INC Active Patents
29 granted patents the USPTO still lists as patented, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2024-09-17: Application 18887175; Invention ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS; Applicant Mattson Technology, Inc.; Status Patented Case.
- 2024-06-27: Application 18756672; Invention Workpiece Processing Apparatus with Thermal Processing Systems; Applicant Mattson Technology, Inc.; Status Patented Case.
- 2024-05-17: Application 18667611; Invention Preheat Processes for Millisecond Anneal System; Applicant Mattson Technology, Inc.; Status Patented Case.
- 2024-05-03: Application 18654429; Invention Electrostatic Chuck Assembly for Plasma Processing Apparatus; Applicant Mattson Technology, Inc.; Status Patented Case.
| Filed | Application | Invention | Applicant | Status | Granted | Patent | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|---|---|
| 2024-09-17 | 18887175 | ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2026-09-08 | 12733445 | US20250014935A1 | Maolin Long Weimin Zeng | United States United States | COMBER, KEVIN J |
| 2024-06-27 | 18756672 | Workpiece Processing Apparatus with Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-09-09 | 12412758 | US20240347356A1 | Rolf Bremensdorfer Dieter Hezler | Germany Germany | WOLFORD, KURT JOSEPH |
| 2024-05-17 | 18667611 | Preheat Processes for Millisecond Anneal System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-11-18 | 12476151 | US20240304502A1 | Markus Lieberer Christian Pfahler Markus Hagedorn Michael vanAbbema Alexandr Cosceev | Germany Germany Germany Germany Germany | KARIMY, TIMOR |
| 2024-05-03 | 18654429 | Electrostatic Chuck Assembly for Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-03-25 | 12261073 | US20240282614A1 | Maolin Long | United States | JACKSON, LAKAISHA |
| 2024-04-30 | 18651606 | Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2026-02-24 | 12562342 | US20240297019A1 | Stephen E. Savas Shawming Ma | United States United States | SATHIRAJU, SRINIVAS |
| 2024-03-06 | 18597421 | Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-08-26 | 12400916 | US20240290664A1 | Michael Storek Rolf Bremensdorfer Markus Lieberer Michael Yang | Germany Germany Germany United States | GHYKA, ALEXANDER G |
| 2024-02-12 | 18439119 | Workpiece Processing Apparatus with Plasma and Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-05-20 | 12308209 | US20240212981A1 | Dieter Hezler Keli Huang Jianmin Ji Deqiang Zeng Manuel Sohn | Germany China China China Germany | LUQUE, RENAN |
| 2023-11-30 | 18524484 | ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-10-15 | 12119254 | US20240096680A1 | Maolin Long Weimin Zeng | United States United States | COMBER, KEVIN J |
| 2023-11-07 | 18503681 | Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-07-01 | 12347677 | US20240071754A1 | Stephen E. Savas Shawming Ma | United States United States | NGUYEN, THANH T |
| 2023-10-25 | 18494486 | Workpiece Processing Apparatus with Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-12-31 | 12183558 | US20240055242A1 | Dixit Desai Alex Wansidler Dieter Hezler Joseph Cibere Rolf Bremensdorfer Pete Lembesis Michael Yang | United States Germany Germany Canada Germany United States United States | CHAN, WEI |
| 2023-06-16 | 18336552 | Arc Lamp With Forming Gas For Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-10-15 | 12119216 | US20230352294A1 | Michael X. Yang Rolf Bremensdorfer Dave Camm Joseph Cibere Dieter Hezler Shawming Ma Yun Yang | United States Germany Canada Canada Germany United States United States | RALEIGH, DONALD L |
| 2023-05-08 | 18313655 | Control System For Adaptive Control Of A Thermal Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-12-24 | 12174616 | US20230273596A1 | Michael X. Yang Markus Lieberer Joseph Cibere | United States Germany Canada | JARRETT, RYAN A |
| 2023-03-17 | 18185970 | Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-04-09 | 11955388 | US20230230887A1 | Michael Storek Rolf Bremensdorfer Markus Lieberer Michael Yang | Germany Germany Germany United States | GHYKA, ALEXANDER G |
| 2022-10-19 | 17969324 | Systems and Methods for Workpiece Processing | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-03-05 | 11923215 | US20230041905A1 | Michael Yang | United States | MYERS, GLENN F |
| 2022-05-27 | 17827198 | Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2023-12-19 | 11848204 | US20220310359A1 | Stephen E. Savas Shawming Ma | United States United States | NGUYEN, THANH T |
| 2022-05-25 | 17824504 | Hybrid Plasma Source Array | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., LTD | Patented Case | 2025-04-01 | 12266503 | US20220384144A1 | Maolin Long | United States | SATHIRAJU, SRINIVAS |
| 2022-05-23 | 17751048 | Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-09-16 | 12417900 | US20220415619A1 | Maolin Long Weimin Zeng Yu Guan | United States United States | YU, YUECHUAN |
| 2022-04-11 | 17717652 | ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2023-12-05 | 11837493 | US20230005778A1 | Maolin Long Weimin Zeng | United States United States | COMBER, KEVIN J |
| 2021-12-28 | 17563560 | Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2026-04-14 | 12603256 | US20230071494A1 | Maolin Long Changle Guan | United States China | SWEELY, KURT D |
| 2021-09-29 | 17489226 | Transfer Apparatus And Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-09-10 | 12087608 | US20230005772A1 | Mengyang Xin Fei Yu Gonglin Luo | China China China | MYERS, GLENN F |
| 2021-09-29 | 17489162 | METHOD FOR PROCESSING WORKPIECE, PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-06-11 | 12009220 | US20230005752A1 | Fei Yu Mengyang Xin Junliang Li | China China China | CULBERT, ROBERTS P |
| 2021-08-27 | 17458807 | Plasma Strip Tool With Movable Insert | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-04-22 | 12283467 | US20220068611A1 | Maolin Long Qiqun Zhang | United States United States | JEFFERSON, QUOVAUNDA |
| 2021-08-26 | 17412969 | Pressure Control System for a Multi-Head Processing Chamber of a Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-07-01 | 12347661 | US20230012873A1 | Maolin Long Changle Guan Junliang Li | United States China China | KENDALL, BENJAMIN R |
| 2021-08-25 | 17411493 | Lift Pin Assembly for a Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-06-11 | 12009184 | US20230010075A1 | Changle Guan Maolin Long | China United States | JOERGER, KAITLIN S |
| 2021-08-18 | 17405150 | Rapid Thermal Processing System With Cooling System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-08-20 | 12068177 | US20220059371A1 | Manuel Sohn Rolf Bremensdorfer Silke Hamm Dieter Hezler | Germany Germany Germany Germany | CHIN, EDWARD |
| 2021-08-18 | 17405142 | Rapid Thermal Processing System With Cooling System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2025-07-15 | 12362194 | US20220059363A1 | Manuel Sohn Rolf Bremensdorfer Silke Hamm Dieter Hezler | Germany Germany Germany Germany | WILCZEWSKI, MARY A |
| 2021-04-28 | 17242383 | Workpiece Processing Apparatus with Plasma and Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2023-12-05 | 11837447 | US20220189747A1 | Dixit Desai Alex Wansidler Dieter Hezler Joseph Cibere Rolf Bremensdorfer Pete Lembesis Michael Yang | United States Germany Germany Canada Germany United States United States | CHAN, WEI |
| 2021-04-23 | 17238597 | Workpiece Processing Apparatus with Plasma and Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Patented Case | 2024-04-09 | 11955315 | US20220189737A1 | Dieter Hezler Keli Huang Jianmin Ji Deqiang Zeng Manuel Sohn | Germany China China China Germany | LUQUE, RENAN |
| 2014-12-11 | 14567631 | System and Process for Calibrating Pyrometers in Thermal Processing Chambers | Mattson Technology, Inc. | Patented Case | 2019-01-29 | 10190915 | US20150092813A1 | Paul Janis Timans | United States | LAU, TUNG S |