MATTSON TECHNOLOGY INC Patent Applications Pending
52 applications still open at the USPTO, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2026-04-21: Application 19654047; Invention Support Plate for Localized Heating in Thermal Processing Systems; Applicant Mattson Technology, Inc.; Status Docketed New Case - Ready for Examination.
- 2026-03-26: Application 19629640; Invention Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus; Applicant Mattson Technology, Inc.; Status Docketed New Case - Ready for Examination.
- 2026-02-25: Application 19549899; Invention Grid Assembly for Plasma Processing Apparatus; Applicant Mattson Technology, Inc.; Status Docketed New Case - Ready for Examination.
- 2025-10-24: Application 19368535; Invention Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber; Applicant Mattson Technology, Inc.; Status Docketed New Case - Ready for Examination.
| Filed | Application | Invention | Applicant | Status | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|
| 2026-04-21 | 19654047 | Support Plate for Localized Heating in Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260271656A1 | Rolf Bremensdorfer Johannes Keppler Michael X. Yang Thorsten Hülsmann | Germany United States United States Germany | CENTRAL, DOCKET |
| 2026-03-26 | 19629640 | Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260221396A1 | Maolin Long Changle Guan | United States China | CENTRAL, DOCKET |
| 2026-02-25 | 19549899 | Grid Assembly for Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260188621A1 | Maolin Long | United States | CENTRAL, DOCKET |
| 2025-10-24 | 19368535 | Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260282781A1 | Vladimir Nagorny | United States | CENTRAL, DOCKET |
| 2025-09-19 | 19334632 | COATINGS FOR THERMAL PROCESSING APPARATUS AND LAMP HEAT SOURCES | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260092740A1 | Michael Storek Martin L. Albrecht Rolf Bremensdorfer | Germany Germany Germany | CENTRAL, DOCKET |
| 2025-09-17 | 19331700 | Workpiece Processing Apparatus with Gas Showerhead Assembly | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260015722A1 | Michael Yang Yun Yang Manuel Sohn Silke Hamm Alex Wansidler Dieter Hezler Rolf Bremensdorfer | United States United States Germany Germany Germany Germany Germany | CENTRAL, DOCKET |
| 2025-09-09 | 19323668 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260074150A1 | Jianpin Zheng Saikumar Kodumuri Chian Siang Tan Subrahmanyam Venkata Rama Kommisetti Michael van Abbema Ludovic Goffart Darius Da Rui Sim | Singapore Singapore Singapore Singapore Singapore Singapore Singapore | CENTRAL, DOCKET |
| 2025-09-09 | 19323635 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260074159A1 | Jianpin Zheng Saikumar Kodumuri Chian Siang Tan Subrahmanyam Venkata Rama Kommisetti Michael van Abbema Ludovic Goffart Darius Da Rui Sim | Singapore Singapore Singapore Singapore Singapore Singapore Singapore | CENTRAL, DOCKET |
| 2025-08-22 | 19307883 | Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250372353A1 | Maolin Long Weimin Zeng Yu Guan | United States United States United States | CENTRAL, DOCKET |
| 2025-08-15 | 19301066 | Workpiece Processing Apparatus with Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250379073A1 | Rolf Bremensdorfer Dieter Hezler | Germany Germany | CENTRAL, DOCKET |
| 2025-07-31 | 19287382 | Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP) Loads | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Non Final Action Mailed | US20250364218A1 | Maolin Long | United States | LE, TUNG X |
| 2025-07-29 | 19283743 | METHODS AND SYSTEMS FOR COATED COMPONENTS OF A PLASMA PROCESSING SYSTEM | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20260031309A1 | Songjae Lee Eran Newman Schubert Chu Qi Zhang | United States United States United States United States | CENTRAL, DOCKET |
| 2025-06-17 | 19240966 | Workpiece Support For A Thermal Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250314267A1 | Manuel Sohn Rolf Bremensdorfer Dieter Hezler | Germany Germany Germany | CENTRAL, DOCKET |
| 2025-06-04 | 19228321 | Workpiece Processing Apparatus with Outer Gas Channel Insert | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250293002A1 | Maolin Long Weimin Zeng | United States United States | CENTRAL, DOCKET |
| 2025-05-27 | 19219450 | Configurable Faraday Shield | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250293007A1 | Maolin Long | United States | CENTRAL, DOCKET |
| 2025-05-23 | 19217589 | Load Lock Chamber for Workpiece Processing | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250379076A1 | Hari Ambal Kyle Barrette Alex Viel | United States United States United States | CENTRAL, DOCKET |
| 2025-04-16 | 19180949 | Workpiece Processing Apparatus with Plasma and Thermal Processing Systems | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Response to Non-Final Office Action Entered and Forwarded to Examiner | US20260162938A1 | Dieter Hezler Keli Huang Jianmin Ji Deqiang Zeng Manuel Sohn | Germany China China China Germany | LUQUE, RENAN |
| 2025-03-20 | 19085350 | Plasma Strip Tool With Movable Insert | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250218740A1 | Maolin Long Qiqun Zhang | United States United States | CENTRAL, DOCKET |
| 2025-02-27 | 19065705 | Hybrid Plasma Source Array | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., LTD | Notice of Allowance Mailed -- Application Received in Office of Publications | US20250201517A1 | Maolin Long | United States | SATHIRAJU, SRINIVAS |
| 2025-02-18 | 19056049 | Electrostatic Chuck Assembly for Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Notice of Allowance Mailed -- Application Received in Office of Publications | US20250191958A1 | Maolin Long | United States | JACKSON, LAKAISHA |
| 2024-12-20 | 18989746 | THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250216154A1 | Dieter Hezler Rolf Bremensdorfer Alex Wansidler Jakob Kirmaier Philip Fricker Markus Lieberer Martin Albrecht Michael Storek | Germany Germany Germany Germany Germany Germany Germany Germany | CENTRAL, DOCKET |
| 2024-12-19 | 18988207 | PLASMA SOURCE COOLING SYSTEM | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250218737A1 | Songjae Lee Xiaotong Zhang | United States United States | CENTRAL, DOCKET |
| 2024-11-25 | 18959024 | Control System For Adaptive Control Of A Thermal Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250093852A1 | Michael X. Yang Markus Lieberer Joseph Cibere | United States Germany Canada | JARRETT, RYAN A |
| 2024-11-19 | 18952428 | GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250167008A1 | Matthias Bauer Rolf Bremensdorfer Alexandr Cosceev Silke Hamm Dieter Hezler Eric Agha Christian Pfahler Kartik Shah Alex Wansidler | Germany Germany Germany Germany Germany Germany Germany United States Germany | CENTRAL, DOCKET |
| 2024-09-27 | 63700146 | COATINGS FOR THERMAL PROCESSING APPARATUS AND LAMP HEAT SOURCES | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Michael Storek Martin L. Albrecht Rolf Bremensdorfer | Germany Germany Germany | ||
| 2024-09-20 | 18891766 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Docketed New Case - Ready for Examination | US20250112030A1 | Kenneth Scott Alexander Butcher Vasil Milchev Georgiev | Canada Canada | CENTRAL, DOCKET |
| 2024-09-09 | 63692451 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Jianpin Zheng Saikumar Kodumuri Adrian Tan Subrahmanyam Venkata Rama Kommisetti Michael van Abbema Ludovic Goffart Darius Sim | Singapore Singapore Singapore Singapore Singapore Singapore Singapore | ||
| 2024-09-09 | 63692444 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Jianpin Zheng Saikumar Kodumuri Adrian Tan Subrahmanyam Venkata Rama Kommisetti Michael van Abbema Ludovic Goffart Darius Sim | Singapore Singapore Singapore Singapore Singapore Singapore Singapore | ||
| 2024-08-13 | 18802719 | Transfer Apparatus And Processing System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Non Final Action Mailed | US20240404858A1 | Mengyang Xin Fei Yu Gonglin Luo | China China China | MYERS, GLENN F |
| 2024-07-29 | 63676656 | METHOD AND SYSTEMS FOR ELECTROPLATED COMPONENTS OF A PLASMA PROCESSING CHAMBER | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Songjae Lee Eran Newman Schubert Chu | United States United States United States | ||
| 2024-07-22 | 18779944 | Rapid Thermal Processing System With Cooling System | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Final Rejection Mailed | US20240379390A1 | Manuel Sohn Rolf Bremensdorfer Silke Hamm Dieter Hezler | Germany Germany Germany Germany | CHIN, EDWARD |
| 2024-06-07 | 63657299 | Load Lock Chamber for Workpiece Processing | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Hari Ambal Kyle Barrette Alex Viel | United States United States United States | ||
| 2024-05-29 | 18677456 | Workpiece Processing Apparatus and Methods for the Treatment of Workpieces | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Non Final Action Mailed | US20240404797A1 | Ting Xie Jiaying Yang Haichun Yang | United States United States United States | MOORE, KARLA A |
| 2024-05-02 | 18653280 | METHOD FOR PROCESSING WORKPIECE, PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Response to Non-Final Office Action Entered and Forwarded to Examiner | US20240355634A1 | Fei Yu Mengyang Xin Junliang Li | China China China | CHEN, KEATH T |
| 2024-03-28 | 63571168 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Jianpin Zheng Saikumar Kodumuri Adrian Tan Subrahmanyam Venkata Rama Kommisetti Michael Vanabbema Ludovic Goffart Sim Darius | Singapore Singapore Singapore Singapore Singapore Singapore Singapore | ||
| 2023-12-29 | 63616161 | PLASMA SOURCE COOLING SYSTEM | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Songjae Lee Xiaotong Zhang | United States United States | ||
| 2023-12-29 | 63616114 | THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Dieter Hezler Rolf Bremensdorfer Alex Wansidler Jakob Kirmaier Philip Fricker Markus Lieberer Martin Albrecht Michael Storek | Germany Germany Germany Germany Germany Germany Germany Germany | ||
| 2023-12-20 | 18390936 | Workpiece Processing Apparatus with Contact Temperature Sensor | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Non Final Action Mailed | US20240222094A1 | Zhaotong Yang Calvin Wong Hari Ambal Avinash Shervegar | United States United States United States United States | MACARTHUR, SYLVIA |
| 2023-11-21 | 63601441 | GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Matthias Bauer Rolf Bremensdorfer Alexandr Cosceev Silke Hamm Dieter Hezler Eric Agha Christian Pfahler Kartik Shah Alex Wansidler | Germany Germany Germany Germany Germany Germany Germany United States Germany | ||
| 2023-11-20 | 18514719 | METHODS OF PROCESSING WORKPIECES USING ORGANIC RADICALS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Notice of Allowance Mailed -- Application Received in Office of Publications | US20240165659A1 | Ting Xie Binhui Hu Haichun Yang | United States United States United States | CULBERT, ROBERTS P |
| 2023-09-28 | 63586230 | PLASMA PROCESSING APPARATUS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Kenneth Scott Alexander Butcher Vasil Milchev Georgiev | Canada Canada | ||
| 2023-09-01 | 18460151 | Temperature Control Using Temperature Control Element Coupled to Faraday Shield | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Final Rejection Mailed | US20230411125A1 | Yorkman Ma Dixit V. Desai | United States United States | SWEELY, KURT D |
| 2023-05-30 | 63504903 | WORKPIECE PROCESSING APPARATUS AND METHODS FOR THE TREATMENT OF WORKPIECES | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Ting Xie Jiaying Yang Haichun Yang | United States United States United States | ||
| 2022-12-28 | 63435711 | Workpiece Processing Apparatus with Contact Temperature Sensor | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Zhaotong Yang Calvin Wong Hari Ambal Avinash Shervegar | United States United States United States United States | ||
| 2022-11-22 | 63427220 | METHODS OF PROCESSING WORKPIECES USING ORGANIC RADICALS | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Ting Xie Binhui Hu Haichun Yang | United States United States United States | ||
| 2022-11-07 | 17981779 | Storage Cassette for Replaceable Parts for Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Publications -- Issue Fee Payment Verified | US20230142778A1 | Kin Pong Lo Peter J. Lembesis | United States United States | RODRIGUEZ MOLINA, MARCOS JAVIER |
| 2022-03-08 | 63317611 | Storage Cassette for Replaceable Parts for Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Kin Pong Lo Peter J. Lembesis | United States United States | ||
| 2022-03-03 | PCTUS2022018667 | SYSTEMS AND METHODS FOR WORKPIECE PROCESSING | MATTSON TECHNOLOGY, INC. BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD. | RO PROCESSING COMPLETED-PLACED IN STORAGE | MICHAEL YANG | United States | ||
| 2021-11-08 | 63276764 | Storage Cassette for Replaceable Parts for Plasma Processing Apparatus | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Provisional Application Expired | Kin Pong Lo Peter J. Lembesis | United States United States | ||
| 2021-09-29 | 17489203 | Method For Processing Workpiece, Plasma Processing Apparatus And Semiconductor Device | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd. | Non Final Action Mailed | US20230005739A1 | Fei Yu Mengyang Xin Junliang Li | China China China | KIM, JAY C |
| 2021-09-10 | 63242534 | Hybrid Plasma Source Array | Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., LTD | Provisional Application Expired | Maolin Long | United States | ||
| 2021-05-28 | 63194529 | Electrostatic Chuck Assembly For Plasma Processing Apparatus | Mattson Technology, Inc. | Provisional Application Expired | Maolin Long | United States |