AXCELIS TECHNOLOGIES INC Active Patents
100 granted patents the USPTO still lists as patented, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2025-01-28: Application 19039069; Invention HIGH TEMPERATURE ION SOURCE; Applicant Axcelis Technologies, Inc.; Status Patented Case.
- 2024-12-05: Application 18969520; Invention SYSTEM AND METHOD OF VERIFYING WORKPIECE ALIGNMENT; Applicant Axcelis Technologies, Inc.; Status Patented Case.
- 2024-09-22: Application 18892499; Invention TWIST AND TILT VERIFICATION USING DIFFRACTION PATTERNS; Applicant Axcelis Technologies, Inc.; Status Patented Case.
- 2023-10-04: Application 18481111; Invention DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET; Applicant Axcelis Technologies, Inc.; Status Patented Case.
| Filed | Application | Invention | Applicant | Status | Granted | Patent | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|---|---|
| 2025-01-28 | 19039069 | HIGH TEMPERATURE ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2025-11-04 | 12463003 | US20250246396A1 | Shu Satoh Neil Colvin | United States United States | CHANG, HANWAY |
| 2024-12-05 | 18969520 | SYSTEM AND METHOD OF VERIFYING WORKPIECE ALIGNMENT | Axcelis Technologies, Inc. | Patented Case | 2026-08-18 | 12713870 | US20250191944A1 | Yusef Nouri | United States | STOFFA, WYATT A |
| 2024-09-22 | 18892499 | TWIST AND TILT VERIFICATION USING DIFFRACTION PATTERNS | Axcelis Technologies, Inc. | Patented Case | 2026-03-03 | 12566064 | US20250116512A1 | Phillip Geissbühler FHM Faridur Rahman Neil Bassom | United States United States United States | TON, TRI T |
| 2023-10-04 | 18481111 | DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET | Axcelis Technologies, Inc. | Patented Case | 2024-10-08 | 12112918 | US20240029998A1 | Wilhelm Platow Neil Bassom | United States United States | TSAI, HSIEN C |
| 2023-09-26 | 18474402 | HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT | Axcelis Technologies, Inc. | Patented Case | 2025-09-30 | 12431332 | US20250104965A1 | Wilhelm Platow Shu Satoh Neil Bassom | United States United States United States | MASKELL, MICHAEL P |
| 2023-07-28 | 18361024 | ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NON-FLUORINE-CONTAINING HALIDE SPECIES OR MOLECULES | Axcelis Technologies, Inc. | Patented Case | 2025-12-16 | 12497687 | US20240035148A1 | Neil Colvin David Sporleder Udo H. Verkerk Atul Gupta Edward Moore | United States United States Canada United States United States | WIECZOREK, MICHAEL P |
| 2023-06-30 | 18345618 | FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLORIDE AS A SOURCE MATERIAL TO GENERATE AN ALUMINUM ION BEAM | Axcelis Technologies, Inc. | Patented Case | 2024-07-30 | 12051561 | US20230352265A1 | Neil K. Colvin Neil Bassom Edward Moore | United States United States United States | TSAI, HSIEN C |
| 2023-06-16 | 18336337 | HYDRAULIC FEED SYSTEM FOR AN ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2024-11-26 | 12154763 | US20230343558A1 | Neil J. Bassom Joshua Abeshaus David Sporleder Neil Colvin Joseph Valinski Michael Cristoforo Vladimir Romanov Pradeepa Kowrikan Subrahmnya | United States United States United States United States United States United States United States India | TSAI, HSIEN C |
| 2022-12-20 | 18084705 | HIGH INCIDENCE ANGLE GRAPHITE FOR PARTICLE CONTROL WITH DEDICATED LOW SPUTTER YIELD ION BEAM | Axcelis Technologies, Inc. | Patented Case | 2026-03-10 | 12571088 | US20230235449A1 | David M. Burtner Neil J. Bassom | United States United States | HASSANZADEH, PARVIZ |
| 2022-10-31 | 17977537 | WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS | Axcelis Technologies, Inc. | Patented Case | 2026-05-12 | 12626885 | US20240145213A1 | Neil Colvin Paul Silverstein Joshua Abeshaus | United States United States United States | CHOI, JAMES J |
| 2022-10-28 | 17976055 | SHIELDED GAS INLET FOR AN ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2025-11-18 | 12476085 | US20230135525A1 | Neil K. Colvin Neil Bassom Joshua Abeshaus | United States United States United States | IPPOLITO, NICOLE MARIE |
| 2022-08-05 | 17881833 | METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION | Axcelis Technologies, Inc. | Patented Case | 2026-08-04 | 12700562 | US20230038565A1 | Causon Jen James S. DeLuca William Bintz | United States United States United States | KIM, ROBERT H |
| 2022-08-04 | 17881020 | Blended energy implant | Axcelis Technologies, Inc. | Patented Case | 2026-06-09 | 12651722 | US20230038392A1 | James S. DeLuca Dwight Roh Patrick Heres Atul Gupta | United States United States United States United States | MASKELL, MICHAEL P |
| 2022-07-29 | 17876812 | METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT | Axcelis Technologies, Inc. | Patented Case | 2025-07-08 | 12354834 | US20240038490A1 | Steven T. Drummond Joshua Max Abeshaus | United States United States | NGUYEN, KIET TUAN |
| 2022-03-28 | 17705503 | DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET | Axcelis Technologies, Inc. | Patented Case | 2023-11-21 | 11823858 | US20230307210A1 | Wilhelm Platow Neil Bassom | United States United States | TSAI, HSIEN C |
| 2022-01-31 | 17588999 | HYDRAULIC FEED SYSTEM FOR AN ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2023-08-15 | 11728140 | US20230245859A1 | Neil J. Bassom Joshua Abeshaus David Sporleder Neil Colvin Joseph Valinski Michael Cristoforo Vladimir Romanov Pradeepa Kowrikan Subrahmnya | United States United States United States United States United States United States United States India | TSAI, HSIEN C |
| 2021-11-10 | 17523359 | HYBRID HIGH-TEMPERATURE ELECTROSTATIC CLAMP FOR IMPROVED WORKPIECE TEMPERATURE UNIFORMITY | Axcelis Technologies, Inc. | Patented Case | 2024-01-30 | 11887808 | US20220148847A1 | Atul Gupta Scott E Galica | United States United States | COMBER, KEVIN J |
| 2021-10-29 | 17514302 | FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLORIDE AS A SOURCE MATERIAL TO GENERATE AN ALUMINUM ION BEAM | Axcelis Technologies, Inc. | Patented Case | 2023-07-11 | 11699565 | US20220139664A1 | Neil K. Colvin Neil Bassom Edward Moore | United States United States United States | TSAI, HSIEN C |
| 2021-09-30 | 17491084 | EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2023-10-24 | 11798775 | US20230100805A1 | Wilhelm Platow Neil Bassom Jonathan David | United States United States United States | TSAI, HSIEN C |
| 2021-06-04 | 17339085 | ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM ION BEAM | Axcelis Technologies, Inc. | Patented Case | 2023-07-11 | 11699563 | US20220139662A1 | Neil K. Colvin Neil Bassom Xiao Xu | United States United States United States | SMITH, DAVID E |
| 2021-05-26 | 17330801 | STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING | Axcelis Technologies, Inc. | Patented Case | 2022-02-08 | 11244800 | US20210398765A1 | Wilhelm Platow Neil Bassom Shu Satoh Paul Silverstein Marvin Farley | United States United States United States United States United States | HINES, ANNE M |
| 2021-05-12 | 17318325 | ION SOURCE WITH MULTIPLE BIAS ELECTRODES | Axcelis Technologies, Inc. | Patented Case | 2023-01-03 | 11545330 | US20220367138A1 | Wilhelm Platow Paul Silverstein Neil Bassom Marvin Farley David Sporleder | United States United States United States United States United States | WILLIAMS, JOSEPH L |
| 2021-04-06 | 17223360 | ION SOURCE REPELLER | Axcelis Technologies, Inc. | Patented Case | 2022-12-06 | 11521821 | US20220319796A1 | Steven T. Drummond Neil Colvin Paul Silverstein | United States United States United States | CHANG, HANWAY |
| 2021-02-05 | 17168897 | APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPLANTATION SYSTEM USING CHARGE STRIPPING MECHANISM | Axcelis Technologies, Inc. | Patented Case | 2024-03-05 | 11923169 | US20210249222A1 | Causon Ko-Chuan Jen Shu Satoh Genise Bonacorsi William Bintz | United States United States United States United States | LOGIE, MICHAEL J |
| 2020-11-20 | 16953509 | HYDROGEN GENERATOR FOR AN ION IMPLANTER | Axcelis Technologies, Inc. | Patented Case | 2022-03-15 | 11276543 | US20210090841A1 | Neil K. Colvin Tseh-Jen Hsieh Richard Rzeszut Wendy Colby | United States United States United States United States | JOHNSTON, PHILLIP A |
| 2020-05-29 | 16887571 | SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOLECULAR CARBON IMPLANTS | Axcelis Technologies, Inc. | Patented Case | 2023-09-12 | 11756772 | US20200388468A1 | David Sporleder Neil Bassom Neil K. Colvin Mike Ameen Xiao Xu | United States United States United States United States United States | SMITH, DAVID E |
| 2020-04-28 | 16860386 | HIGH POWER WAFER COOLING | Axcelis Technologies, Inc. | Patented Case | 2023-06-06 | 11670483 | US20200350139A1 | Joseph Ferrara | United States | ZERVIGON, RUDY |
| 2020-04-16 | 16850066 | MULTIPLE ARC CHAMBER SOURCE | Axcelis Technologies, Inc. | Patented Case | 2021-11-23 | 11183365 | US20200335302A1 | Joshua Max Abeshaus Neil Bassom Camilla Lambert Caleb Wisch Kyle Hinds Caleb Bell | United States United States United States United States United States United States | SMITH, DAVID E |
| 2020-03-19 | 16824069 | LIQUID METAL ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2021-11-09 | 11170967 | US20200303154A1 | Neil Bassom Neil Colvin Tseh-Jen Hsieh Michael Ameen | United States United States United States United States | KAISER, SYED M |
| 2020-02-14 | 16791308 | METHOD OF MIXING UPSTREAM AND DOWNSTREAM CURRENT MEASUREMENTS FOR INFERENCE OF THE BEAM CURRENT AT THE BEND OF AN OPTICAL ELEMENT FOR REALTIME DOSE CONTROL | Axcelis Technologies, Inc. | Patented Case | 2023-05-09 | 11646175 | US20200266032A1 | James DeLuca Andy Ray Neil Demario Rosario Mollica | United States United States United States United States | STOFFA, WYATT A |
| 2019-12-19 | 16720499 | SCAN AND CORRECTOR MAGNET DESIGNS FOR HIGH THROUGHPUT SCANNED BEAM ION IMPLANTER | Axcelis Technologies, Inc. | Patented Case | 2021-06-15 | 11037754 | US20200194221A1 | Edward Eisner Bo Vanderberg | United States United States | CHANG, HANWAY |
| 2019-08-23 | 16549239 | SUBSTRATE SUPPORT HAVING CUSTOMIZABLE AND REPLACEABLE FEATURES FOR ENHANCED BACKSIDE CONTAMINATION PERFORMANCE | Axcelis Technologies, Inc. | Patented Case | 2021-09-07 | 11114330 | US20200066570A1 | John Baggett Dave Shaner | United States United States | PATEL, DHARTI HARIDAS |
| 2019-07-12 | 16509915 | TOXIC OUTGAS CONTROL POST PROCESS | Axcelis Technologies, Inc. | Patented Case | 2024-02-13 | 11901198 | US20210013061A1 | John F. Baggett | United States | MACARTHUR, SYLVIA |
| 2019-05-10 | 16409423 | HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING | Axcelis Technologies, Inc. | Patented Case | 2021-07-13 | 11062873 | US20190348252A1 | Neil K. Colvin Tseh-Jen Hsieh | United States United States | MASKELL, MICHAEL P |
| 2019-03-28 | 16367948 | IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL | Axcelis Technologies, Inc. | Patented Case | 2021-01-26 | 10903097 | US20190304820A1 | John F. Baggett Ronald N. Reece Petros Miltiades Kopalidis | United States United States United States | SMITH, DAVID E |
| 2019-01-21 | 16252884 | HYDROGEN GENERATOR FOR AN ION IMPLANTER | Axcelis Technologies, Inc. | Patented Case | 2020-11-24 | 10847339 | US20190228943A1 | Neil K. Colvin Tseh-Jen Hsieh Richard Rzeszut Wendy Colby | United States United States United States United States | JOHNSTON, PHILLIP A |
| 2019-01-04 | 16239995 | REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA HEATED CHAMBER HOUSING FOR SEMICONDUCTOR PROCESSING EQUIPMENT | Axcelis Technologies, Inc. | Patented Case | 2020-07-14 | 10714317 | US20200219705A1 | John F. Baggett | United States | PURINTON, BROOKE J |
| 2018-12-21 | 16229572 | METHOD FOR DECREASING COOL DOWN TIME WITH HEATED SYSTEM FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT | Axcelis Technologies, Inc. | Patented Case | 2023-08-15 | 11728187 | US20200203196A1 | John Baggett Joseph Ferrara | United States United States | MOORE, KARLA A |
| 2018-12-20 | 16227399 | WAFER SOAK TEMPERATURE READBACK AND CONTROL VIA THERMOCOUPLE EMBEDDED END EFFECTOR FOR SEMICONDUCTOR PROCESSING EQUIPMENT | Axcelis Technologies, Inc. | Patented Case | 2021-05-18 | 11011397 | US20200203199A1 | John Baggett | United States | ISLAM, MD M |
| 2018-12-20 | 16227296 | TETRODE EXTRACTION APPARATUS FOR ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2020-02-25 | 10573485 | Wilhelm Platow Edward Eisner Bo Vanderberg Neil Bassom Michael Cristoforo Joshua Abeshaus | United States United States United States United States United States United States | CHANG, HANWAY | |
| 2018-12-19 | 16225298 | SYSTEM AND METHOD OF ARC DETECTION USING DYNAMIC THRESHOLD | Axcelis Technologies, Inc. | Patented Case | 2019-12-24 | 10515780 | Yusef Nouri | United States | NGUYEN, KIET TUAN | |
| 2018-12-13 | 16218884 | SCAN AND CORRECTOR MAGNET DESIGNS FOR HIGH THROUGHPUT SCANNED BEAM ION IMPLANTER | Axcelis Technologies, Inc. | Patented Case | 2020-02-04 | 10553392 | Edward Eisner Bo Vanderberg | United States United States | CHANG, HANWAY | |
| 2018-12-12 | 16217664 | ION SOURCE WITH TAILORED EXTRACTION APERTURE SHAPE | Axcelis Technologies Inc. | Patented Case | 2020-07-14 | 10714296 | US20200194219A1 | Patrick T. Heres Denis A. Robitaille | United States United States | PURINTON, BROOKE J |
| 2018-11-16 | 16192838 | FILM STABILIZATION THROUGH NOVEL MATERIALS MODIFICATION OF BEAMLINE COMPONENTS | Axcelis Technologies, Inc. | Patented Case | 2020-06-23 | 10689752 | US20190144991A1 | David A. Kirkwood Joseph F. Valinski | United States United States | IPPOLITO, NICOLE MARIE |
| 2018-10-25 | 16170085 | SHALLOW ANGLE, MULTI-WAVELENGTH, MULTI-RECEIVER, ADJUSTABLE SENSITIVITY ALIGNER SENSOR FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT | Axcelis Technologies, Inc. | Patented Case | 2020-10-06 | 10794694 | US20190120617A1 | John F. Baggett Billy Thomas Benoit Joe Ferrara Brian Terry | United States United States United States United States | RAHMAN, MD M |
| 2018-10-05 | 16152439 | SYSTEM AND METHOD FOR IN-SITU BEAMLINE FILM STABILIZATION OR REMOVAL IN THE AEF REGION | Axcelis Technologies, Inc. | Patented Case | 2020-03-03 | 10580616 | US20190108972A1 | Teng-Chao David Tao David Allen Kirkwood | United States United States | SMITH, DAVID E |
| 2018-09-07 | 16124676 | RF RESONATOR FOR ION BEAM ACCELERATION | Axcelis Technologies, Inc. | Patented Case | 2019-07-02 | 10342114 | US20190088443A1 | Shu Satoh | United States | CHAI, RAYMOND REI-YANG |
| 2018-08-28 | 16114745 | SYSTEM AND METHOD FOR ALIGNING LIGHT-TRANSMITTING BIREFRINGENT WORKPIECES | Axcelis Technologies, Inc. | Patented Case | 2020-07-21 | 10720354 | US20200075379A1 | Neil James Bassom | United States | PRIETO, VIOLETA A |
| 2018-08-21 | 16106745 | SCANNING MAGNET DESIGN WITH ENHANCED EFFICIENCY | Axcelis Technologies, Inc. | Patented Case | 2021-09-07 | 11114270 | US20200066478A1 | Bo Vanderberg Edward Eisner | United States United States | PURINTON, BROOKE J |
| 2018-08-14 | 16102868 | LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS | Axcelis Technologies, Inc. | Patented Case | 2020-01-14 | 10535498 | US20180358202A1 | Neil K. Colvin Tseh-Jen Hsieh Paul B. Silverstein | United States United States United States | LUCK, SEAN M |
| 2018-08-10 | 16100645 | LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS | Axcelis Technologies, Inc. | Patented Case | 2020-06-09 | 10679818 | US20180350553A1 | John F. Baggett Neil Colvin | United States United States | IPPOLITO, NICOLE MARIE |
| 2018-06-01 | 15995707 | HYDROGEN CO-GAS WHEN USING ALUMINUM IODIDE AS AN ION SOURCE MATERIAL | Axcelis Technologies, Inc. | Patented Case | 2020-06-09 | 10676370 | US20180346342A1 | Neil Colvin Tseh-Jen Hsieh Neil Basson | United States United States United States | SMITH, DAVID E |
| 2018-04-12 | 15951495 | WAFER COOLING SYSTEM AND METHOD | Axcelis Technologies, Inc. | Patented Case | 2019-09-03 | 10403503 | US20180233367A1 | Marvin Farley Mike Ameen Causon Ko-Chuan Jen | United States United States United States | HOANG, QUOC DINH |
| 2018-03-01 | 15909318 | TWO-AXIS VARIABLE WIDTH MASS RESOLVING APERTURE WITH FAST ACTING SHUTTER MOTION | Axcelis Technologies, Inc. | Patented Case | 2019-08-27 | 10395891 | US20190272976A1 | Michael Paul Cristoforo Justin White McCabe | United States United States | CHANG, HANWAY |
| 2018-01-31 | 15884492 | OUTGASSING IMPACT ON PROCESS CHAMBER REDUCTION VIA CHAMBER PUMP AND PURGE | Axcelis Technologies, Inc. | Patented Case | 2019-03-12 | 10227693 | John F. Baggett | United States | AMER, MOUNIR S | |
| 2018-01-16 | 15872543 | RADIANT HEATING PRESOAK | Axcelis Technologies, Inc. | Patented Case | 2020-12-08 | 10861731 | US20180204755A1 | John F. Baggett Billy Benoit | United States United States | ROMAN, ANGEL |
| 2017-12-05 | 15831972 | METHOD TO PROVIDE CONSISTENT ELECTROSTATIC CLAMPING THROUGH REAL TIME CONTROL OF ELECTROSTATIC CHARGE DEPOSITION IN AN ELECTROSTATIC CHUCK | Axcelis Technologies, Inc. | Patented Case | 2020-06-23 | 10692749 | US20190172743A1 | Edward K. McIntyre William P. Reynolds | United States United States | PATEL, DHARTI HARIDAS |
| 2017-11-09 | 15807664 | PHOSPHOROUS TRIFLUORIDE CO-GAS FOR CARBON IMPLANTS | Axcelis Technologies, Inc. | Patented Case | 2019-04-09 | 10256069 | US20180144904A1 | Neil Colvin Tseh-Jen Hsieh | United States United States | MASKELL, MICHAEL P |
| 2017-11-09 | 15807652 | PHOSPHINE CO-GAS FOR CARBON IMPLANTS | Axcelis Technologies, Inc. | Patented Case | 2019-07-23 | 10361081 | US20180144940A1 | Neil Colvin Tseh-Jen Hsieh | United States United States | MEHTA, RATISHA |
| 2017-09-18 | 15707473 | WAFER TEMPERATURE CONTROL WITH CONSIDERATION TO BEAM POWER INPUT | Axcelis Technologies, Inc. | Patented Case | 2018-11-13 | 10128084 | John Baggett Joe Ferrara Brian Terry | United States United States United States | SOUW, BERNARD E | |
| 2017-06-29 | 15637538 | ION IMPLANTATION SYSTEM HAVING BEAM ANGLE CONTROL IN DRIFT AND DECELERATION MODES | Axcelis Technologies, Inc. | Patented Case | 2018-07-31 | 10037877 | Bo H. Vanderberg Edward C. Eisner | United States United States | MCCORMACK, JASON L | |
| 2017-06-20 | 15627989 | IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMIC ALUMINUM IONS AND IN SITU CLEANING OF ALUMINUM IODIDE AND ASSOCIATED BY-PRODUCTS | Axcelis Technologies, Inc. | Patented Case | 2020-09-15 | 10774419 | US20170362700A1 | Dennis Elliott Kamenitsa Richard J. Rzeszut Fernando M. Silva Jason R. Beringer Xiangyang Wu | United States United States United States United States United States | SMITH, DAVID E |
| 2017-06-20 | 15627952 | IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMIC ALUMINUM IONS AND IN SITU CLEANING OF ALUMINUM IODIDE AND ASSOCIATED BY-PRODUCTS | Axcelis Technologies, Inc. | Patented Case | 2018-10-02 | 10087520 | US20170362699A1 | Dennis Elliott Kamenitsa Richard J. Rzeszut Fernando M. Silva Neil K. Colvin | United States United States United States United States | FERNANDES, ERROL V |
| 2017-05-31 | 15609273 | WAFER COOLING APPARATUS AND METHOD | Axcelis Technologies, Inc. | Patented Case | 2018-05-22 | 9978599 | US20170352544A1 | Marvin Farley Mike Ameen Causon Ko-Chuan Jen | United States United States United States | HOANG, QUOC DINH |
| 2017-04-03 | 15477680 | ION SOURCE REPELLER SHIELD | Axcelis Technologies, Inc. | Patented Case | 2019-07-23 | 10361069 | US20170287579A1 | Neil K. Colvin Tseh-Jen Hsieh Paul B. Silverstein | United States United States United States | CHOI, JAMES J |
| 2017-01-19 | 15410711 | ION SOURCE CATHODE SHIELD | Axcelis Technologies, Inc. | Patented Case | 2018-04-10 | 9941087 | US20170207054A1 | Neil K. Colvin Tseh-Jen Hsieh Paul b. Silverstein | United States United States United States | CHANG, DANIEL D |
| 2017-01-19 | 15410707 | MULTI-PIECE ELECTRODE APERTURE | Axcelis Technologies, Inc. | Patented Case | 2018-01-16 | 9870893 | US20170207057A1 | Neil K. Colvin Tseh-Jen Hsieh Paul B. Silverstein | United States United States United States | SOUW, BERNARD E |
| 2016-12-27 | 15391086 | HIGH THROUGHPUT SERIAL WAFER HANDLING END STATION | Axcelis Technologies, Inc. | Patented Case | 2020-11-10 | 10832926 | US20170178933A1 | Joseph Ferrara Robert J. Mitchell | United States United States | FORD, NATHAN K |
| 2016-11-29 | 15363728 | TWO-AXIS VARIABLE WIDTH MASS RESOLVING APERTURE WITH FAST ACTING SHUTTER MOTION | Axcelis Technologies, Inc. | Patented Case | 2018-04-24 | 9953801 | Michael Paul Cristoforo Justin White McCabe | United States United States | LUCK, SEAN M | |
| 2016-11-28 | 15361813 | SYSTEM FOR SEMICONDUCTOR WAFER RETENTION AND SENSING IN A VACUUM LOAD LOCK | Axcelis Technologies, Inc. | Patented Case | 2020-02-25 | 10573541 | US20180151407A1 | Stanley W. Stone | United States | WILSON, LEE D |
| 2016-11-14 | 15350832 | LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS | Axcelis Technologies, Inc. | Patented Case | 2018-09-11 | 10074508 | US20180138006A1 | John Baggett Neil Colvin | United States United States | IPPOLITO, NICOLE MARIE |
| 2016-11-04 | 15344502 | ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS | Axcelis Technologies, Inc. | Patented Case | 2018-05-22 | 9978555 | US20170133193A1 | Neil K. Colvin Tseh-Jen Hsieh | United States United States | SMITH, DAVID E |
| 2016-09-30 | 15281844 | IN-SITU CLEANING USING HYDROGEN PEROXIDE AS CO-GAS TO PRIMARY DOPANT OR PURGE GAS FOR MINIMIZING CARBON DEPOSITS IN AN ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2019-01-01 | 10170286 | US20180096828A1 | Neil K. Colvin Tseh-Jen Hsieh | United States United States | MASKELL, MICHAEL P |
| 2016-09-30 | 15281757 | INTEGRATED EMISSIVITY SENSOR ALIGNMENT CHARACTERIZATION | Axcelis Technologies, Inc. | Patented Case | 2018-08-07 | 10041789 | US20180094921A1 | John F. Baggett Joseph Ferrara | United States United States | DECENZO, SHAWN H |
| 2016-09-30 | 15281600 | MULTIPLE DIAMETER IN-VACUUM WAFER HANDLING | Axcelis Technologies, Inc. | Patented Case | 2018-03-06 | 9911636 | Allan D. Weed | United States | IPPOLITO, NICOLE MARIE | |
| 2016-09-30 | 15281540 | ADJUSTABLE CIRCUMFERENCE ELECTROSTATIC CLAMP | Axcelis Technologies, Inc. | Patented Case | 2019-01-22 | 10186446 | US20180096875A1 | Allan D. Weed | United States | STOFFA, WYATT A |
| 2016-09-07 | 15258723 | IN SITU BEAM CURRENT MONITORING AND CONTROL IN SCANNED ION IMPLANTATION SYSTEMS | Axcelis Technologies, Inc. | Patented Case | 2019-08-27 | 10395889 | US20180068828A1 | Alfred Mike Halling | United States | STOFFA, WYATT A |
| 2015-12-28 | 14979663 | SYSTEM AND METHOD TO IMPROVE PRODUCTIVITY OF HYBRID SCAN ION BEAM IMPLANTERS | Axcelis Technologies, Inc. | Patented Case | 2017-07-18 | 9711329 | US20160189928A1 | Bo H. Vanderberg Andy M. Ray | United States United States | IPPOLITO, NICOLE MARIE |
| 2015-12-22 | 14978776 | Combined Multipole Magnet and Dipole Scanning Magnet | Axcelis Technologies, Inc. | Patented Case | 2017-04-11 | 9620327 | US20160189913A1 | Edward C. Eisner | United States | MASKELL, MICHAEL P |
| 2015-12-22 | 14978120 | Beam Profiling Speed Enhancement for Scanned Beam Implanters | Axcelis Technologies, Inc. | Patented Case | 2019-11-19 | 10483086 | US20160189926A1 | Andy M. Ray Edward C. Eisner Bo H. Vanderberg | United States United States United States | SMITH, DAVID E |
| 2015-12-22 | 14978089 | Combined Electrostatic Lens System for Ion Implantation | Axcelis Technologies, Inc. | Patented Case | 2017-06-13 | 9679739 | US20160189912A1 | Edward C. Eisner Bo H. Vanderberg | United States United States | MASKELL, MICHAEL P |
| 2015-12-17 | 14972334 | Method of Measuring Vertical Beam Profile in an Ion Implantation System Having a Vertical Beam Angle Device | Axcelis Technologies, Inc. | Patented Case | 2017-07-18 | 9711328 | US20160189927A1 | Shu Satoh | United States | IPPOLITO, NICOLE MARIE |
| 2015-12-09 | 14963703 | WAFER CLAMP DETECTION BASED ON VIBRATION OR ACOUSTIC CHARACTERISTIC ANALYSIS | Axcelis Technologies, Inc. | Patented Case | 2018-07-17 | 10024825 | US20160187302A1 | Shu Satoh | United States | CHAPMAN JR, JOHN E |
| 2015-09-16 | 14855667 | SYSTEM AND METHOD FOR ELECTROSTATIC CLAMPING OF WORKPIECES | Axcelis Technologies, Inc. | Patented Case | 2018-01-16 | 9871473 | US20160087557A1 | Edward K. McIntyre Thang D. Nguyen | United States United States | JACKSON, STEPHEN W |
| 2015-08-26 | 14835780 | CAM ACTUATED FILAMENT CLAMP | Axcelis Technologies, Inc. | Patented Case | 2016-11-22 | 9502207 | John F. Baggett Jason R. Beringer | United States United States | GREEN, TRACIE Y | |
| 2015-08-04 | 14817893 | HIGH THROUGHPUT COOLED ION IMPLANTATION SYSTEM AND METHOD | Axcelis Technologies, Inc. | Patented Case | 2017-03-28 | 9607803 | US20170040141A1 | Armin Huseinovic Joseph Ferrara Brian Terry | United States United States United States | MASKELL, MICHAEL P |
| 2015-04-21 | 14692395 | ANGULAR SCANNING USING ANGULAR ENERGY FILTER | Axcelis Technologies, Inc. | Patented Case | 2016-09-27 | 9455116 | US20150318142A1 | Causon Ko-Chuan Jen William Bintz | United States United States | MASKELL, MICHAEL P |
| 2015-03-31 | 14674694 | INTEGRATED EXTRACTION ELECTRODE MANIPULATOR FOR ION SOURCE | Axcelis Technologies, Inc. | Patented Case | 2016-04-19 | 9318302 | Bo Vanderberg Joseph Valinski Michael Cristoforo | United States United States United States | VANORE, DAVID A | |
| 2015-02-25 | 14631066 | BIPOLAR WAFER CHARGE MONITOR SYSTEM AND ION IMPLANTATION SYSTEM COMPRISING SAME | Axcelis Technologies, Inc. | Patented Case | 2017-01-31 | 9558914 | US20160247664A1 | Marvin Farley Takao Sakase Joseph Foley | United States United States United States | SMYTH, ANDREW P |
| 2014-12-29 | 14584252 | ION IMPLANTATION SYSTEM AND METHOD WITH VARIABLE ENERGY CONTROL | Axcelis Technologies, Inc. | Patented Case | 2015-12-22 | 9218941 | US20150200073A1 | Causon Ko-Chuan Jen Marvin Farley | United States United States | SOUW, BERNARD E |
| 2014-06-27 | 14317778 | HIGH THROUGHPUT HEATED ION IMPLANTATION SYSTEM AND METHOD | Axcelis Technologies, Inc. | Patented Case | 2016-06-28 | 9378992 | US20150380285A1 | Armin Huseinovic Joseph Ferrara Brian Terry | United States United States United States | VANORE, DAVID A |
| 2014-02-12 | 14178795 | CONSTANT MASS FLOW MULTI-LEVEL COOLANT PATH ELECTROSTATIC CHUCK | Axcelis Technologies, Inc. | Patented Case | 2017-12-19 | 9847240 | US20150228515A1 | William Davis Lee | United States | SCHERMERHORN, JON |
| 2014-02-12 | 14178719 | Variable Electrode Pattern for Versatile Electrostatic Clamp Operation | Axcelis Technologies, Inc. | Patented Case | 2017-04-25 | 9633885 | US20150228523A1 | William Davis Lee | United States | NGUYEN, DANNY |
| 2014-01-30 | 14168770 | METHOD FOR ENHANCING BEAM UTILIZATION IN A SCANNED BEAM ION IMPLANTER | Axcelis Technologies, Inc. | Patented Case | 2015-08-18 | 9111719 | US20150214005A1 | Shu Satoh | United States | JOHNSTON, PHILLIP A |
| 2013-12-20 | 14135754 | REDUCED TRACE METALS CONTAMINATION ION SOURCE FOR AN ION IMPLANTATION SYSTEM | Axcelis Technologies, Inc. | Patented Case | 2017-01-10 | 9543110 | US20150179393A1 | Neil Colvin Tseh-Jen Hsieh | United States United States | SMITH, DAVID E |
| 2013-11-21 | 14086578 | METHOD FOR MEASURING TRANSVERSE BEAM INTENSITY DISTRIBUTION | Axcelis Technologies, Inc. | Patented Case | 2015-01-13 | 8933424 | Shu Satoh | United States | WELLS, NIKITA | |
| 2013-08-29 | 14013728 | IMPLANT-INDUCED DAMAGE CONTROL IN ION IMPLANTATION | Axcelis Technologies, Inc. | Patented Case | 2016-11-08 | 9490185 | US20140065730A1 | Ronald N. Reece Shu Satoh Serguei Kondratenko Andy Ray | United States United States United States United States | HOSSAIN, MOAZZAM |
| 2013-06-11 | 13915149 | WORKPIECE CARRIER | Axcelis Technologies, Inc. | Patented Case | 2015-06-23 | 9064673 | US20140361197A1 | William Davis Lee Kevin J. Hoyt David Shanner Jason Beringer | United States United States United States United States | NGUYEN, KIET TUAN |
| 2012-12-28 | 13729524 | CHARGE INTEGRATION BASED ELECTROSTATIC CLAMP HEALTH MONITOR | AXCELIS TECHNOLOGIES, INC. | Patented Case | 2019-06-18 | 10324121 | US20140188416A1 | Edward K. McIntyre Edward J. Ladny Nathaniel Robinson William Davis Lee | United States United States United States United States | CROHN, MARK I |
| 2012-09-24 | 13625277 | SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY AND UNIFORMITY | AXCELIS TECHNOLOGIES INC. | Patented Case | 2013-08-06 | 8502173 | US20130026356A1 | Bo H. Vanderberg Steven C. Hays Andy Ray | United States United States United States | NGUYEN, KIET TUAN |
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