| 2026-02-26 | 10-K | 10.8 | Non-Employee Director Cash Compensation at February 14, 2026. Filed herewith. |
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| 2026-02-26 | 10-K | 10.7 | Named Executive Officer Base Compensation at February 14, 2026. Filed herewith. |
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| 2026-02-26 | 10-K | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended by the Board of Directors on November 13, 2025. Filed herewith. |
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| 2025-05-08 | 8-K | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as approved by the stockholders of the Company on May 7, 2025. Filed herewith. |
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| 2025-02-28 | 10-K | 10.9 | Non-Employee Director Cash Compensation at February 15, 2025. Filed herewith. |
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| 2025-02-28 | 10-K | 10.8 | Named Executive Officer Base Compensation at February 15, 2025. Filed herewith. |
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| 2025-02-28 | 10-K | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended by the Board of Directors on November 13, 2024. Filed herewith. |
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| 2024-02-23 | 10-K | 10.14 | Executive Compensation Clawback Policy, as adopted by the Board of Directors on August 10, 2023. Filed herewith. |
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| 2024-02-23 | 10-K | 10.9 | Non-Employee Director Cash Compensation at February 15, 2024. Filed herewith. |
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| 2024-02-23 | 10-K | 10.8 | Named Executive Officer Base Compensation at February 15, 2024. Filed herewith. |
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| 2023-05-12 | 8-K | 10.1 | Employment Agreement between the Company and Russell J. Low dated May 11, 2023. Filed herewith. |
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| 2023-04-18 | 8-K | 10.1 | Amended and Restated Employment Agreement between Axcelis Technologies, Inc. and Mary G. Puma dated as of February 24, 2023. |
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| 2023-02-24 | 10-K | 10.15 | Executive Compensation Clawback Policy, as adopted by the Board of Directors on November 13, 2014. Filed herewith. |
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| 2023-02-24 | 10-K | 10.9 | Non-Employee Director Cash Compensation at February 15, 2023. Filed herewith. |
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| 2023-02-24 | 10-K | 10.8 | Named Executive Officer Base Compensation at February 15, 2023. Filed herewith. |
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| 2022-11-03 | 10-Q | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan as Amended by Board of Directors August 2022. Filed herewith. |
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| 2022-08-04 | 10-Q | 10.1 | 2022 Amended and Restated Employment Agreement between the Company and Mary G. Puma dated May 24, 2022. Filed herewith. |
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| 2022-02-25 | 10-K | 10.9 | Non-Employee Director Cash Compensation at February 25, 2022. Filed herewith. |
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| 2022-02-25 | 10-K | 10.8 | Named Executive Officer Base Compensation at February 25, 2022. Filed herewith. |
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| 2021-05-06 | 10-Q | 10.1 | First Amendment to Credit Agreement effective as of March 25, 2021, amending the Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020 among the Company, the several banks and other financial institutions or entities party thereto, and Silicon Valley Bank. Filed herewith. |
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| 2021-02-26 | 10-K | 10.12 | Non-Employee Director Cash Compensation at February 26, 2021. Filed herewith. |
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| 2021-02-26 | 10-K | 10.11 | Named Executive Officer Base Compensation at February 26, 2021. Filed herewith. |
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| 2020-11-06 | 10-Q | 10.2 | Guarantee and Collateral Agreement dated as of July 31, 2020 made by Axcelis Technologies, Inc. and the other grantors referred to therein in favor of Silicon Valley Bank, as Administrative Agent. Filed herewith. |
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| 2020-11-06 | 10-Q | 10.1 | Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020, among Axcelis Technologies, Inc., as the Borrower, the several lenders from time to time party thereto, and Silicon Valley Bank, as Administrative Agent, Issuing Lender and Swingline Lender, and as Lead Arranger. Filed herewith. |
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| 2020-03-02 | 10-K | 10.12 | Non‑Employee Director Cash Compensation at March 02, 2020. Filed herewith. |
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| 2020-03-02 | 10-K | 10.11 | Named Executive Officer Base Compensation at March 02, 2020. Filed herewith. |
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| 2019-08-07 | 10-Q | 10.2 | Form of Amended and Restated Executive Separation Pay Agreement between the Company and each of Kevin J. Brewer, William Bintz, John E. Aldeborgh, Lynnette C. Fallon, Douglas A. Lawson, and Russell J. Low, executive officers of the Company dated May 15, 2019. Filed herewith. |
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| 2019-03-11 | 10-K | 10.13 | Non‑Employee Director Cash Compensation at March 11, 2019. Filed herewith. |
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| 2019-03-11 | 10-K | 10.12 | Named Executive Officer Base Compensation at March 11, 2019. Filed herewith. |
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| 2019-03-11 | 10-K | 10.2 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 5, 2019. Filed herewith. |
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| 2018-03-14 | 10-K | 10.13 | Non‑Employee Director Cash Compensation at March 14, 2018. Filed herewith. |
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| 2018-03-14 | 10-K | 10.12 | Named Executive Officer Base Compensation at March 14, 2018. Filed herewith. |
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| 2018-03-14 | 10-K | 10.2 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 13, 2018. Filed herewith. |
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| 2017-08-04 | 10-Q | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 16, 2017. Filed herewith. |
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| 2017-03-14 | 10-K | 10.13 | Non‑Employee Director Cash Compensation at March 14, 2017. Filed herewith. |
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| 2017-03-14 | 10-K | 10.12 | Named Executive Officer Base Compensation at March 14, 2017. Filed herewith. |
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| 2017-03-14 | 10-K | 10.6 | Form of Change in Control Agreement, as amended, as approved by the Compensation Committee of the Board of Directors on November 11, 2016, between the Company and certain of its executive officers. Filed herewith. |
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| 2017-03-14 | 10-K | 10.2 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 15, 2017. Filed herewith. |
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| 2016-08-08 | 10-Q | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 4, 2016, as adjusted for the reverse stock split effective June 30, 2016. Filed herewith. |
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| 2016-03-04 | 10-K | 10.13 | -- Click here to rapidly navigate through this document |
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| 2016-03-04 | 10-K | 10.12 | -- Click here to rapidly navigate through this document |
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| 2015-08-05 | 10-Q | 10.1 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 13, 2015. Filed herewith. |
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| 2015-03-11 | 10-K | 10.24 | Lease Agreement between the Company and Beverly Property Owner LLC, effective January 30, 2015. Filed herewith. |
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| 2015-03-11 | 10-K | 10.23 | Second Amendment to the Loan and Security Agreement between the Company and Silicon Valley Bank., effective February 2, 2015. Filed herewith. |
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| 2015-03-11 | 10-K | 10.15 | Form of Executive Separation Pay Agreement between the Company and each of Kevin J. Brewer, William Bintz, John E. Aldeborgh, Lynnette C. Fallon and Douglas A. Lawson dated March 5, 2015. Filed herewith. |
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| 2015-03-11 | 10-K | 10.13 | Non-Employee Director Cash Compensation at March 5, 2015. Filed herewith. |
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| 2015-03-11 | 10-K | 10.12 | Named Executive Officer Base Compensation at March 5, 2015. Filed herewith. |
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| 2015-03-11 | 10-K | 10.2 | Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through November 13, 2014. Filed herewith. |
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| 2015-03-11 | 10-K | 10.1 | Axcelis Technologies, Inc. 2000 Stock Plan, as amended through November 13, 2014. Filed herewith. |
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| 2014-11-06 | 10-Q | 10.3 | Waiver and First Amendment dated August 1, 2014 to the Loan and Security Agreement dated as of October 31, 2013 between the Company and Silicon Valley Bank. Filed herewith. |
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| 2014-11-06 | 10-Q | 10.2 | Amendment dated August 18, 2014 to the Business Loan Agreement dated as of July 5, 2013 between the Company and Northern Bank & Trust. Filed herewith. |
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| 2014-11-06 | 10-Q | 10.1 | Letter agreement between the Company and Mary G. Puma dated July 31, 2014, modifying her Amended and Restated Employment Agreement with the Company with respect to base pay in 2014. Filed herewith. |
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| 2014-08-08 | 10-Q | 10.1 | Letter Agreement between the Company and Northern Bank & Trust Company dated May 2, 2014, amending the Business Loan Agreement with Northern Bank & Trust Company. Filed herewith. |
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| 2014-03-03 | 10-K | 10.13 | Non-Employee Director Cash Compensation at March 1, 2014. Filed herewith. |
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| 2014-03-03 | 10-K | 10.12 | Named Executive Officer Base Compensation at March 1, 2014. Filed herewith. |
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| 2013-11-08 | 10-Q | 10.4 | Loan and Security Agreement dated as of October 31, 2013 between the Company and Silicon Valley Bank. Filed herewith. |
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| 2013-08-02 | 8-K | 10.1 | Executive Separation Agreement between the Company and Jay Zager dated as of July 17, 2013 (executed July 30, 2013). Filed herewith. |
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| 2013-08-02 | 10-Q | 10.2 | Mortgage and Fixture Filing dated as of July 5, 2013 by the Company in favor of Northern Bank &Trust Company. Filed herewith. |
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| 2013-08-02 | 10-Q | 10.1 | Business Loan Agreement dated as of July 5, 2013 between the Company and Northern Bank &Trust Company. Filed herewith. |
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| 2013-03-01 | 10-K | 10.17 | Letter Agreement with Mary G. Puma dated February 10, 2012. Filed herewith. |
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| 2013-03-01 | 10-K | 10.13 | Non-Employee Director Cash Compensation at February 29, 2012. Filed herewith. |
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| 2013-03-01 | 10-K | 10.12 | Named Executive Officer Base Compensation at February 29, 2012. Filed herewith. |
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| 2012-12-04 | 8-K | 10.2 | Transition Agreement dated December 3, 2012 between Axcelis Technologies, Inc. and Lam Research Corporation. |
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| 2012-12-04 | 8-K | 10.1 | Asset Purchase Agreement dated December 3, 2012 between Axcelis Technologies, Inc. and Lam Research Corporation. |
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| 2012-11-05 | 10-Q | 10.1 | Third Loan Modification Agreement dated as of September 10, 2012 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Filed herewith. |
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| 2012-08-07 | 10-Q | 10.5 | Form of Change in Control Agreement, as approved by the Board of Directors on April 27, 2012 between the Company and each of its executive officers. Filed herewith. |
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| 2012-08-07 | 10-Q | 10.4 | Form of Restricted Stock Unit Award Agreement under the 2012 Equity Incentive Plan, adopted June 18, 2012. Filed herewith. |
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| 2012-08-07 | 10-Q | 10.3 | Form of Non-Employee Director Non-Qualified Stock Option Certificate under the 2012 Equity Incentive Plan, adopted June 18, 2012. Filed herewith. |
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| 2012-08-07 | 10-Q | 10.2 | Form of Employee Non-Qualified Stock Option Certificate under the 2012 Equity Incentive Plan, adopted June 18, 2012. Filed herewith. |
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| 2012-05-04 | 10-Q | 10.1 | Second Loan Modification Agreement dated as of March 5, 2012 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Filed herewith. |
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| 2012-02-29 | 10-K | 10.16 | First Loan Modification Agreement dated as of December 27, 2011 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank with other Company subsidiaries confirming guaranties. Filed herewith. |
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| 2012-02-29 | 10-K | 10.14 | Letter Agreement with Mary G. Puma dated September 22, 2011. Filed herewith. |
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| 2012-02-29 | 10-K | 10.11 | Non-Employee Director Cash Compensation at February 29, 2012. Filed herewith. |
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| 2012-02-29 | 10-K | 10.10 | Named Executive Officer Base Compensation at February 29, 2012. Filed herewith. |
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| 2012-02-29 | 10-K | 10.4 | Form of Indemnification Agreement approved by the Board of Directors of the Company on February 9, 2012 for use with each of its directors and officers, together with a schedule of each current indemnitee. Filed herewith. |
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| 2012-02-24 | 8-K | 10.1 | Executive Separation Agreement between Axcelis Technologies, Inc. and Matthew P. Flynn, dated as of February 10, 2012. Filed herewith. |
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| 2011-05-06 | 10-Q | 10.1 | Second Amended and Restated Loan and Security Agreement dated as of April 25, 2011 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Filed herewith. |
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| 2011-03-14 | 10-K | 10.10 | Non-Employee Director Cash Compensation at March 14, 2011. Filed herewith. |
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| 2011-03-14 | 10-K | 10.9 | Named Executive Officer Base Compensation at March 14, 2011. Filed herewith. |
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| 2011-01-18 | 8-K | 10.1 | Executive Retirement Agreement between Axcelis Technologies, Inc. and Stephen G. Bassett, dated January 17, 2011. Filed herewith. |
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| 2010-05-27 | 8-K | 10.1 | First Loan Modification Agreement entered into as of May 25, 2010 among the Company, Axcelis Technologies CCS Corporation and Silicon Valley Bank. Filed herewith. |
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| 2010-05-12 | 10-Q | 10.2 | Export-Import Bank Loan and Security Agreement dated as of March 12, 2010 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Filed herewith. |
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| 2010-05-12 | 10-Q | 10.1 | Amended and Restated Loan and Security Agreement dated as of March 12, 2010 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Filed herewith. |
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| 2010-03-15 | 10-K | 10.10 | Non-Employee Director Cash Compensation at March 15, 2010. Filed herewith. |
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| 2010-03-15 | 10-K | 10.9 | Named Executive Officer Base Compensation at March 15, 2010. Filed herewith. |
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| 2010-03-15 | 10-K | 10.2 | Axcelis Management Incentive Plan, as amended and restated by the Compensation Committee of the Board of Directors on February 11, 2010. Filed herewith. |
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| 2009-05-11 | 8-K | 10.1 | Letter from Mary G. Puma to the Board of Directors dated May 1, 2009. Filed herewith. |
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| 2009-04-03 | 8-K | 10.1 | License Agreement dated as of March 30, 2009 between the Company and SEN Corporation, an SHI and Axcelis Company. Filed herewith. |
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| 2009-03-31 | 10-K | 10.10 | Non-Employee Director Cash Compensation at March 31, 2009. Filed herewith. |
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| 2009-03-31 | 10-K | 10.9 | Named Executive Officer Base Compensation at March 31, 2009. Filed herewith. |
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| 2009-02-27 | 8-K | 10.2 | Letter to Axcelis dated February 25, 2009 from U.S. Bank National Association, as trustee under the Indenture dated as of May 2, 2006 relating to Axcelis’ 4.25% Convertible Senior Subordinated Notes. |
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| 2009-02-27 | 8-K | 10.1 | Share Purchase Agreement dated February 26, 2009 among Axcelis Technologies, Inc. (“Axcelis”), Sumitomo Heavy Industries, Ltd. and SEN Corporation, an SHI and Axcelis Company. |
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