ULTRATECH INC Form PRE 14A: Preliminary proxy statement
Filings on SEC EDGAR, newest first; amendments sit with their base form. Values are as filed.
- 2012-05-18: Form PRE 14A; Period of report 2012-07-17; Description PRELIMINARY PROXY STATEMENT; Document d356024dpre14a.htm.
- 2009-05-22: Form PRE 14A; Period of report 2009-07-21; Description PRELIMINARY PROXY STATEMENT; Document dpre14a.htm.
- 1998-04-07: Form PRE 14A; Period of report 1998-06-03; Description PRE 14A.
| Filed | Form | Period of report | Description | Document |
|---|---|---|---|---|
| 2012-05-18 | PRE 14A | 2012-07-17 | PRELIMINARY PROXY STATEMENT | d356024dpre14a.htm |
| 2009-05-22 | PRE 14A | 2009-07-21 | PRELIMINARY PROXY STATEMENT | dpre14a.htm |
| 1998-04-07 | PRE 14A | 1998-06-03 | PRE 14A |