ULTRATECH INC Form DEF 14A: Definitive proxy statement
Filings on SEC EDGAR, newest first; amendments sit with their base form. Values are as filed.
- 2015-06-08: Form DEF 14A; Period of report 2015-07-21; Description DEFINITIVE PROXY STATEMENT; Document d930538ddef14a.htm.
- 2014-06-02: Form DEF 14A; Period of report 2014-07-15; Description DEFINITIVE PROXY STATEMENT; Document d694519ddef14a.htm.
- 2013-06-03: Form DEF 14A; Period of report 2013-07-16; Description DEFINITIVE PROXY STATEMENT; Document d544179ddef14a.htm.
- 2012-06-05: Form DEF 14A; Period of report 2012-07-17; Description DEFINITIVE PROXY STATEMENT; Document d356024ddef14a.htm.
| Filed | Form | Period of report | Description | Document |
|---|---|---|---|---|
| 2015-06-08 | DEF 14A | 2015-07-21 | DEFINITIVE PROXY STATEMENT | d930538ddef14a.htm |
| 2014-06-02 | DEF 14A | 2014-07-15 | DEFINITIVE PROXY STATEMENT | d694519ddef14a.htm |
| 2013-06-03 | DEF 14A | 2013-07-16 | DEFINITIVE PROXY STATEMENT | d544179ddef14a.htm |
| 2012-06-05 | DEF 14A | 2012-07-17 | DEFINITIVE PROXY STATEMENT | d356024ddef14a.htm |
| 2011-06-06 | DEF 14A | 2011-07-19 | DEFINITIVE PROXY STATEMENT | ddef14a.htm |
| 2010-06-10 | DEF 14A | 2010-07-20 | DEFINITIVE PROXY STATEMENT | ddef14a.htm |
| 2009-06-04 | DEF 14A | 2009-07-21 | DEFINITIVE PROXY STATEMENT | ddef14a.htm |
| 2008-06-19 | DEF 14A | 2008-07-22 | DEFINITIVE PROXY STATEMENT | f41489dedef14a.htm |
| 2007-06-11 | DEF 14A | 2007-07-24 | DEFINITIVE PROXY STATEMENT | f26417dedef14a.htm |
| 2006-04-28 | DEF 14A | 2006-07-18 | DEFINITIVE PROXY STATEMENT | a06-3223_1def14a.htm |
| 2005-05-02 | DEF 14A | 2005-07-19 | DEF 14A | a05-7354_1def14a.htm |
| 2004-04-28 | DEF 14A | 2004-06-03 | DEF 14A | a2134425zdef14a.htm |
| 2003-04-29 | DEF 14A | 2003-06-05 | DEF 14A | a2109312zdef14a.htm |
| 2002-04-19 | DEF 14A | 2002-06-06 | DEFINITIVE 14A | a2077226zdef14a.htm |
| 2001-04-25 | DEF 14A | 2001-06-07 | DEF 14A | a2046057zdef14a.txt |
| 2000-04-27 | DEF 14A | 2000-06-01 | DEF 14A | |
| 1999-04-27 | DEF 14A | 1999-06-03 | SCH 14A | |
| 1998-04-29 | DEF 14A | 1998-06-03 | DEF 14A | |
| 1997-04-01 | DEF 14A | 1997-05-15 | DEF 14A |