ULTRATECH INC Form 10-K405: Annual report (Item 405 box checked)
Filings on SEC EDGAR, newest first; amendments sit with their base form. Values are as filed.
- 2002-03-27: Form 10-K405; Period of report 2001-12-31; Description 10-K405; Document a2074072z10-k405.htm.
| Filed | Form | Period of report | Description | Document |
|---|---|---|---|---|
| 2002-03-27 | 10-K405 | 2001-12-31 | 10-K405 | a2074072z10-k405.htm |