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ONTO INNOVATION INC. (ONTO) Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense

ONTO INNOVATION INC. Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense

ONTO INNOVATION INC. (ONTO) reported Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense of -$12.00 thousand for the 12-month period ending 2026-01-03, per its 10-K filed 2026-02-24.

Financial Statements › Expense Statement

us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense · last filed 2026-02-24

  • ONTO INNOVATION INC. unrecognized tax benefits, income tax penalties and interest expense for fiscal 2026 was -$12.00K.
  • ONTO INNOVATION INC. unrecognized tax benefits, income tax penalties and interest expense for fiscal 2024 was -$223.00K, a 252.74% decline from fiscal 2023.
  • ONTO INNOVATION INC. unrecognized tax benefits, income tax penalties and interest expense for fiscal 2023 was $146.00K.
  • ONTO INNOVATION INC. unrecognized tax benefits, income tax penalties and interest expense for fiscal 2022 was -$149.00K.
Period endUnrecognized Tax Benefits, Income Tax Penalties and Interest Expense 12 monthUnrecognized Tax Benefits, Income Tax Penalties and Interest Expense 12 month as first filed
2026-01-03-$12.00K
10-K · filed 2026-02-24
2024-12-28-$223.00K
10-K · filed 2026-02-24
2023-12-30$146.00K
10-K · filed 2026-02-24
2022-12-31-$149.00K
10-K · filed 2025-02-25
$149.00K
10-K · filed 2023-02-24
2022-01-01-$814.00K
10-K · filed 2024-02-26
2020-12-26-$193.00K
10-K · filed 2023-02-24
2019-12-31$236.00K
10-K · filed 2022-02-25
2018-12-31$199.00K
10-K · filed 2020-02-25
2017-12-31$199.00K
10-K · filed 2021-02-19
$246.00K
10-K · filed 2020-02-25

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