MATTSON TECHNOLOGY INC Form S-3: Registration statement (short form)
Filings on SEC EDGAR, newest first; amendments sit with their base form. Values are as filed.
- 2013-10-29: Form S-3/A; Description S-3/A; Document mtsn20131029_s-3a.htm.
- 2013-10-11: Form S-3; Description S-3; Document mtsn20131010s-3.htm.
- 2010-09-30: Form S-3/A; Description S-3/A; Document s3abody.htm.
- 2010-07-21: Form S-3; Description S-3; Document s3body.htm.
| Filed | Form | Period of report | Description | Document |
|---|---|---|---|---|
| 2013-10-29 | S-3/A | S-3/A | mtsn20131029_s-3a.htm | |
| 2013-10-11 | S-3 | S-3 | mtsn20131010s-3.htm | |
| 2010-09-30 | S-3/A | S-3/A | s3abody.htm | |
| 2010-07-21 | S-3 | S-3 | s3body.htm | |
| 2005-06-29 | S-3/A | AMENDMENT NO. 2 TO THE FORM S-3 | ds3a.htm | |
| 2005-06-29 | S-3/A | AMENDMENT NO. 2 TO THE FORM S-3 | ds3a.htm | |
| 2005-06-16 | S-3/A | AMENDMENT NO. 1 TO REGISTRATION STATMENTENT ON FORM S-3 | ds3a.htm | |
| 2005-06-16 | S-3/A | AMENDMENT NO. 1 TO REGISTRATION STATEMENT ON FORM S-3 | ds3a.htm | |
| 2004-11-10 | S-3 | REGISTRATION STATEMENT ON FORM S-3 | ds3.htm | |
| 2004-08-23 | S-3 | FORM S-3 | ds3.htm | |
| 2003-12-23 | S-3 | REGISTRATION STATEMENT ON FORM S-3 | ds3.htm | |
| 2002-04-12 | S-3 | FORM S-3 | ds3.txt | |
| 2000-03-01 | S-3/A | AMENDMENT NO. 2 TO FORM S-3 | ||
| 2000-02-16 | S-3/A | AMENDMENT NO. 1 TO FORM S-3 | ||
| 2000-01-28 | S-3 | FORM S-3 | ||
| 1999-05-06 | S-3 | S-3 |