CYMER INC Patent Applications Pending
33 applications still open at the USPTO, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.
- 2006-10-20: Application PCTUS2006041137; Invention SYSTEMS AND METHODS TO SHAPE LASER LIGHT AS A HOMOGENEOUS LINE BEAM FOR INTERACTION WITH A FILM DEPOSITED ON A SUBSTRATE; Applicant CYMER, INC.; Status RO PROCESSING COMPLETED-PLACED IN STORAGE.
- 2006-10-20: Application PCTUS2006041107; Invention LASER SYSTEM; Applicant CYMER, INC.; Status PCT - IPER (International Preliminary Examination Report) 409-416 Mailed.
- 2006-10-20: Application PCTUS2006041102; Invention EUV LIGHT SOURCE; Applicant CYMER, INC.; Status RO PROCESSING COMPLETED-PLACED IN STORAGE.
- 2006-10-20: Application PCTUS2006041053; Invention BLISTER RESISTANT OPTICAL COATINGS; Applicant CYMER, INC.; Status RO PROCESSING COMPLETED-PLACED IN STORAGE.
| Filed | Application | Invention | Applicant | Status | Published as | Inventor name | Inventor country | Examiner |
|---|---|---|---|---|---|---|---|---|
| 2006-10-20 | PCTUS2006041137 | SYSTEMS AND METHODS TO SHAPE LASER LIGHT AS A HOMOGENEOUS LINE BEAM FOR INTERACTION WITH A FILM DEPOSITED ON A SUBSTRATE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | RICHARD L. SANDSTROM ROBERT P. AKINS | United States United States | YOUNG, LEE W | |
| 2006-10-20 | PCTUS2006041107 | LASER SYSTEM | CYMER, INC. | PCT - IPER (International Preliminary Examination Report) 409-416 Mailed | ALEXANDER I. ERSHOV WILLIAM N. PARTLO DANIEL J.W. BROWN IVAN LALOVIC ROBERT A. BERGSTEDT RICHARD L. SANDSTROM IGOR V. FOMENKOV | United States United States United States United States United States United States United States | ZHANG, YUANDA | |
| 2006-10-20 | PCTUS2006041102 | EUV LIGHT SOURCE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | NORBERT R. BOWERING BJORN A.M. HANSSON RODNEY D. SIMMONS | United States Sweden United States | YOUNG, LEE W | |
| 2006-10-20 | PCTUS2006041053 | BLISTER RESISTANT OPTICAL COATINGS | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | JOHN T. MELCHIOR | United States | PROCTOR, JEAN | |
| 2006-10-20 | PCTUS2006040830 | SYSTEMS AND METHODS TO SHAPE LASER LIGHT AS A LINE BEAM FOR INTERACTION WITH A SUBSTRATE HAVING SURFACE VARIATIONS | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | DAVID S. KNOWLES | United States | YOUNG, LEE W | |
| 2006-09-27 | PCTUS2006037884 | 6K PULSE REPETITION RATE AND ABOVE GAS DISCHARGE LASER SYSTEM SOLID STATE PULSE POWER SYSTEM IMPROVEMENTS | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | CHAOFENG HUANG RICHARD M. NESS PAUL C. MELCHER | United States United States United States | YOUNG, LEE W | |
| 2006-09-20 | PCTUS2006036876 | WEB-BASED METHOD FOR INFORMATION SEARCHES | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ROBERT P. AKINS WILLIAM C. CRAY ALBERT P. CEFALO BRIAN C. KLENE | United States United States United States United States | RAAB, CHRISTOPHER J | |
| 2006-07-12 | PCTUS2006027015 | MULTI-CHAMBER GAS DISCHARGE LASER BANDWIDTH CONTROL THROUGH DISCHARGE TIMING | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ROBERT N. JACQUES DANIEL J.W. BROWN WILLIAM M. PARTLO | United States United States United States | YOUNG, LEE W | |
| 2006-06-29 | PCTUS2006025792 | SYSTEMS AND METHODS FOR EUV LIGHT SOURCE METROLOGY | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | IGOR V. FOMENKOV JERZY R. HOFFMAN NORBERT R. BOWERING | United States United States United States | HOPPE, SHARON S | |
| 2006-06-28 | PCTUS2006025350 | GAS DISCHARGE LASER LINE NARROWING MODULE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | RAYMOND F. CYBULSKI ROBERT A. BERGSTEDT GON WANG RICHARD L. SANDSTROM WILLIAM N. PARTLO | United States United States United States United States United States | PARK, KINAM | |
| 2006-06-28 | PCTUS2006025349 | ACTIVE BANDWIDTH CONTROL FOR A LASER | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | DANIEL J. REILEY ROBERT A. BERGSTEDT GERMAN E. RYLOV | United States United States United States | THOMAS, SHANE M | |
| 2006-06-27 | PCTUS2006025171 | LPP EUV DRIVE LASER INPUT SYSTEM | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | RODNEY D. SIMMONS JOHN VIATELLA OLEH KHODYKIN R. KYLE WEBB ALEXANDER N. BYKANOV JERZY R. HOFFMAN | United States United States United States United States United States United States | LOGIE, MICHAEL J | |
| 2006-06-27 | PCTUS2006024960 | LLP EUV LIGHT SOURCE DRIVE LASER SYSTEM | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ALEXANDER I. ERSHOV IGOR V. FOMENKOV OLEH KHODYKN ALEXANDER N. BYKANOV | United States United States United States United States | LOGIE, MICHAEL J | |
| 2006-06-27 | PCTUS2006024959 | ALTERNATIVE FUELS FOR EUV LIGHT SOURCE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | NORBERT R. BOWERING IGOR V. FOMENKOV ALEXANDER N. BYKANOV OLEH KHODYKIN | United States United States United States United States | SAHU, MEENAKSHI S | |
| 2006-06-27 | PCTUS2006024941 | LPP EUV PLASMA SOURCE MATERIAL TARGET DELIVERY SYSTEM | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ALEXANDER N. BYKANOV OSCAR HEMBERG OLEH KHODYKIN J. MARTIN ALGOTS | United States United States United States United States | HOPPE, SHARON S | |
| 2006-06-23 | PCTUS2006024822 | EUV LIGHT SOURCE COLLECTOR EROSION MITIGATION | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | WILLIAM N. PARTLO ALEXANDER I. ERSHOV WILLIAM OLDHAM DAVID W. MYERS IGOR V. FOMENKOV | United States United States United States United States United States | DOWNS, CASSANDRA B | |
| 2006-06-23 | PCTUS2006024464 | IMPROVED SPECTRAL METROLOGY FOR HIGH REPETITION RATE GAS DISCHARGE LASER | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ROBERT J. RAFAC | United States | ROBINSON, ANDRE | |
| 2006-06-23 | PCTUS2006024463 | EUV LIGHT SOURCE COLLECTOR LIFETIME IMPROVEMENTS | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | WILLIAM N. PARTLO OLEH KHODYKIN IGOR V. FOMENKOV ALEXANDER I. ERSHOV | United States United States United States United States | CHAPMAN, NOVA M | |
| 2006-06-23 | PCTUS2006024446 | EUV LIGHT SOURCE COLLECTOR EROSION MITIGATION | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | WILLIAM N. PARTLO IGOR V. FOMENKOV ALEXANDER I. ERSHOV | United States United States United States | YOUNG, LEE W | |
| 2006-05-25 | PCTUS2006020224 | SYSTEMS AND METHODS FOR DEFLECTING PLASMA-GENERATED IONS TO PREVENT THE IONS FROM REACHING AN INTERNAL COMPONENT OF AN EUV LIGH SOURCE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | JERZY R. HOFFMAN CURTIS L. RETTING ERNESTO L. VARGAS | United States United States United States | NGUYEN, KIET TUAN | |
| 2006-05-25 | PCTUS2006020223 | SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPER AS A LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE | CYMER, INC | RO PROCESSING COMPLETED-PLACED IN STORAGE | PALASH P. DAS WILLIAM N. PARTLO SCOTT SMITH THOMAS HOFMANN | United States United States United States United States | NGUYEN, TUAN N | |
| 2006-03-27 | PCTUS2006011339 | 6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | RICHARD C. UJAZDOWSKI RICHARD M. NESS J. MARTIN ALGOTS VLADIMIR B. FLEUROV THOMAS MCKELVY WALTER D. GILLESPIE BRYAN G. MOOSMAN THOMAS D. STEIGER BRETT D. SMITH FREDERICK A. PALENSCHAT | United States United States United States United States United States United States United States United States United States United States | HAGAN, SEAN P | |
| 2006-03-27 | PCTUS2006011305 | GAS DISCHARGE LASER OUTPUT LIGHT BEAM PARAMETER CONTROL | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | HERVE A. BESSAUCELE IGOR V. FOMENKOV HAO TON-THAT FEDOR TRINTICHOUK WILLIAM N. PARTLO | United States United States United States United States United States | HAGAN, SEAN P | |
| 2006-02-24 | PCTUS2006006947 | LASER PRODUCED PLASMA EUV LIGHT SOURCE WITH PRE-PULSE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | OLEH KHODYKIN ALEXANDER N. BYKANOV | United States United States | JOHNSTON, PHILLIP A | |
| 2006-02-24 | PCTUS2006006410 | LASER PRODUCED PLASMA EUV LIGHT SOURCE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ALEXANDER I. ERSHOV NORBERT N. BOWERING WILLIAM N. PARTLO | United States United States United States | YOUNG, LEE W | |
| 2006-02-24 | PCTUS2006006409 | SOURCE MATERIAL DISPENSER FOR EUV LIGHT SOURCE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | OLEH KHODYKIN ALEXANDER N. BYKANOV | United States United States | LOGIE, MICHAEL J | |
| 2006-02-24 | PCTUS2006006408 | SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | NORBERT R. BOWERING BJORN A.M. HANSSON WILLIAM N. PARTLO OLEH KHODYKIN ALEXANDER I. ERSHOV ALEXANDER N. BYKANOV | United States United States United States United States United States United States | VANORE, DAVID A | |
| 2006-02-24 | PCTUS2006006407 | SYSTEMS AND METHODS FOR CLEANING A CHAMBER WINDOW OF AN EUV LIGHT SOURCE | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | WILLIAM F. MARX ALEXANDER N. BYKANOV | United States United States | SAHU, MEENAKSHI S | |
| 2006-02-22 | PCTUS2006006600 | METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY TARGET MATERIAL HANDLING | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | ALEXANDER N. BYKANOV | United States | YOUNG, LEE W | |
| 2006-02-22 | PCTUS2006006597 | LPP EUV DRIVE LASER | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | DANIEL J.W. BROWN ALEXANDER I. ERSHOV WILLIAM N. PARTLO IGOR V. FOMENKOV VLADIMIR B. FLEUROV | United States United States United States United States United States | PARK, KINAM | |
| 2006-02-17 | PCTUS2006005647 | METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | JOHN MARTIN ALGOTS IGOR V. FOMENKOV ALEXANDER I. ERSHOV DENNIS W. COBB RICHARD L. SANDSTROM OSCAR HEMBERG ALEXANDER N. BYKANOV WILLIAM N. PARTLO | United States United States United States United States United States United States United States United States | LOGIE, MICHAEL J | |
| 2006-02-17 | PCTUS2006005541 | METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | JOHN MARTIN ALGOTS TAE H. CHUNG OSCAR HEMBERG | United States United States United States | STOFFA, WYATT A | |
| 2006-01-09 | PCTUS2006000603 | METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF GAS DISCHARGE LASER SYSTEM | CYMER, INC. | RO PROCESSING COMPLETED-PLACED IN STORAGE | PAOLO ZAMBON TOM A. WATSON JOHN A. RULE WEIJIE ZHENG OMEZ S. MESINA | United States United States United States United States United States | NGUYEN, PHILLIP |