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CYMER INC Patents: Expired

CYMER INC Expired Patents

4 granted patents the USPTO lists as expired; the status gives the reason, newest filing first, as the USPTO Open Data Portal records them; the company is the first-named applicant. The application number opens the full record at Patent Center.

  • 2013-03-15: Application 13843626; Invention EXTREME ULTRAVIOLET LIGHT SOURCE; Applicant CYMER, INC.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
  • 2013-03-14: Application 13830905; Invention CONTROLLING SPATIAL PROPERTIES IN AN EXCIMER RING AMPLIFIER; Applicant CYMER, INC.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
  • 2013-02-15: Application 13768588; Invention SYSTEM AND METHOD FOR ADJUSTING SEED LASER PULSE WIDTH TO CONTROL EUV OUTPUT ENERGY; Applicant CYMER, INC.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
  • 2012-11-13: Application 13675972; Invention EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME; Applicant CYMER, INC.; Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362.
FiledApplicationInventionApplicantStatusGrantedPatentPublished asInventor nameInventor countryExaminer
2013-03-1513843626EXTREME ULTRAVIOLET LIGHT SOURCECYMER, INC.Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.3622014-03-258680495
Yezheng Tao
Robert Jay Rafac
Igor V. Fomenkov
Daniel J.W. Brown
United States
United States
United States
United States
VANORE, DAVID A
2013-03-1413830905CONTROLLING SPATIAL PROPERTIES IN AN EXCIMER RING AMPLIFIERCYMER, INC.Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.3622014-01-078624209
Robert Jay Rafac
Dershen Wan
Eric Mason
Rostislav Rokitski
United States
United States
United States
United States
VANORE, DAVID A
2013-02-1513768588SYSTEM AND METHOD FOR ADJUSTING SEED LASER PULSE WIDTH TO CONTROL EUV OUTPUT ENERGYCYMER, INC.Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.3622015-04-079000403US20140233005A1
James Crouch
Matthew Graham
Robert J. Rafac
Daniel Jason Riggs
United States
United States
United States
United States
WHITESELL, STEVEN H
2012-11-1313675972EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAMECYMER, INC.Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.3622014-04-018686370US20130070332A1
Norbert R. Bowering
Oleh V. Khodykin
Germany
United States
MALEVIC, DJURA