| 2026-08-05 | 8-K | 10.1 | Amended and Restated Employment Agreement, dated as of August 4, 2026, between Amtech Systems, Inc. and Robert C. Daigle.* |
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| 2026-08-05 | 10-Q | 10.3 | Offer Letter, dated April 17, 2026, with Thomas Sabol |
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| 2026-08-05 | 10-Q | 10.2 | Offer Letter, dated March 9, 2026, with Guy Shechter |
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| 2026-05-07 | 8-K | 10.1 | Offer Letter between the Company and Guy Shechter, dated March 9, 2026 |
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| 2026-04-30 | 8-K | 10.1 | Offer Letter between the Company and Thomas Sabol, dated April 17, 2026 |
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| 2026-02-05 | 10-Q | 10.1 | Offer Letter, dated December 9, 2025, with Mark Weaver |
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| 2025-12-10 | 10-K | 10.6 | Amendment No. 2 to Employee Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated effective as of August 6, 2024 |
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| 2025-12-10 | 10-K | 10.5 | Amendment No. 1 to Employee Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated effective as of February 29, 2024 |
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| 2024-12-12 | 10-K | 10.6 | Amendment No. 2 to Employee Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated effective as of August 6, 2024 |
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| 2024-12-12 | 10-K | 10.5 | Amendment No. 1 to Employee Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated effective as of February 29, 2024 |
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| 2023-12-14 | 10-K | 10.8 | Loan and Security Agreement, dated as of January 17, 2023, by and among the Registrant, its U.S. based wholly owned subsidiaries Bruce Technologies, Inc., a Massachusetts corporation, BTU International, Inc., a Delaware corporation, Intersurface Dynamics, Incorporated, a Connecticut corporation, P.R. Hoffman Machine Products, Inc., an Arizona corporation, Entrepix, Inc., an Arizona corporation, and Advanced Compound Materials, Inc., a Delaware corporation, as borrowers, and UMB Bank, N.A., national banking association, as lender. |
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| 2023-12-14 | 10-K | 10.7 | Forbearance & Modification Agreement entered into effective as of December 5, 2023 by and between the Registrant, its U.S. based wholly owned subsidiaries Bruce Technologies, Inc., a Massachusetts corporation, BTU International, Inc., a Delaware corporation, Intersurface Dynamics, Incorporated, a Connecticut corporation, P.R. Hoffman Machine Products, Inc., an Arizona corporation, Entrepix, Inc., an Arizona corporation, and Advanced Compound Materials, Inc., a Delaware corporation, as borrowers, and UMB Bank, N.A., national banking association, as lender. |
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| 2023-12-14 | 10-K | 10.4 | Employment Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated August 14, 2023* |
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| 2023-02-08 | 10-Q | 10.2 | Loan and Security Agreement, dated as of January 17, 2023, by and among the Registrant, its U.S. based wholly owned subsidiaries Bruce Technologies, Inc., a Massachusetts corporation, BTU International, Inc., a Delaware corporation, Intersurface Dynamics, Incorporated, a Connecticut corporation, P.R. Hoffman Machine Products, Inc., an Arizona corporation, and Entrepix, Inc., an Arizona corporation, as borrowers, and UMB Bank, N.A., national banking association, as lender. |
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| 2023-02-08 | 10-Q | 10.1 | Agreement and Plan of Merger, dated January 17, 2023, by and among the Registrant, Emerald Merger Sub, Inc., an Arizona corporation and wholly owned subsidiary of the Registrant, Entrepix, Inc., an Arizona corporation, Timothy P. Tobin, solely in his capacity as the shareholders’ representative, and the Key Shareholders (as defined in the Agreement and Plan of Merger). |
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| 2022-11-30 | 10-K | 10.9 | Jong S. Whang Separation Agreement* |
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| 2022-08-15 | 10-Q | 10.2 | First Amendment to Purchase Agreement dated June 22, 2022, between BTU International, Inc. and MCP III 23 Esquire LLC |
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| 2022-08-15 | 10-Q | 10.1 | Purchase and Sale Agreement dated April 15, 2022, between BTU International, Inc. and Rhino Capital Advisors LLC |
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| 2019-02-07 | 10-Q | 10.2 | Letter Agreement between Amtech Systems, Inc. and Fokko Pentinga dated December 28, 2018 |
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| 2019-02-07 | 10-Q | 10.1 | Separation Agreement and General Release of All Claims between Amtech Systems, Inc. and Fokko Pentinga dated November 28, 2018 |
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| 2016-11-16 | 8-K | 10.3 | Change of Control and Severance Agreement, dated November 10, 2016, between Amtech Systems, Inc. and Robert T. Hass |
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| 2016-11-16 | 8-K | 10.2 | Terms of Employment for Robert T. Hass, dated November 10, 2016, between Amtech Systems, Inc. and Robert T. Hass |
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| 2016-11-16 | 8-K | 10.1 | Fifth Amendment to Employment Agreement, dated November 10, 2016, between Amtech Systems, Inc. and Fokko Pentinga |
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| 2016-05-05 | 10-Q | 10.2 | Key Terms for Robert Hass Employment Agreement, dated February 22, 2016, by and between the Amtech Systems, Inc. and Robert T. Hass |
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| 2016-05-05 | 10-Q | 10.1 | Second Amendment to Employment Agreement, dated March 10, 2016, by and between the Amtech Systems, Inc. and Bradley C. Anderson |
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| 2015-11-19 | 8-K | 10.1 | Fifth Amendment to Employment Agreement, dated November 19, 2015, by and between the Company and Jong S. Whang |
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| 2015-08-06 | 10-Q | 10.5 | Investment Agreement regarding Shanghai Kingstone Semiconductor Company, Ltd., dated July 17, 2015, by and between Kingstone Technology Hong Kong Limited and Suzhou Zhou Jing Investment Center (LP) |
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| 2015-04-10 | 8-K | 10.4 | Amtech Systems, Inc. 2007 Employee Stock Incentive Plan, as amended through April 10, 2015 |
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| 2015-04-10 | 8-K | 10.3 | Employment Agreement, dated April 9, 2015, by and between Bradley C. Anderson and the Company |
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| 2015-04-10 | 8-K | 10.2 | Fourth Amendment to Employment Agreement, dated April 9, 2015, by and between the Company and Fokko Pentinga |
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| 2015-04-10 | 8-K | 10.1 | Fourth Amendment to Employment Agreement, dated April 9, 2015, by and between the Company and Jong S. Whang |
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| 2015-02-02 | 8-K | 10.2 | Consulting Agreement, dated October 21, 2014, by and between Paul J. van der Wansem and the Company |
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| 2015-02-02 | 8-K | 10.1 | Employment Agreement, dated October 21, 2014, by and between Paul J. van der Wansem and the Company |
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| 2014-05-14 | 8-K | 10.2 | AMENDED 2007 EMPLOYEE STOCK INCENTIVE PLAN |
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| 2014-05-14 | 8-K | 10.1 | AMENDED NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN |
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| 2013-08-08 | 10-Q | 10.19 | EMPLOYMENT AGREEMENT AND RELEASE |
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| 2013-08-08 | 10-Q | 10.18 | EMPLOYMENT AGREEMENT AND RELEASE |
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| 2013-08-08 | 10-Q | 10.17 | AMENDMENT TO CHANGE OF CONTROL SEVERANCE AGREEMENT |
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| 2013-08-08 | 10-Q | 10.16 | AMENDMENT TO EMPLOYMENT AGREEMENT |
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| 2013-08-08 | 10-Q | 10.15 | AMENDMENT TO EMPLOYMENT AGREEMENT |
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| 2012-12-03 | 8-K/A | 10.1 | Change of Control Severance Agreement dated March 10, 2008. |
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| 2012-11-30 | 8-K | 10.1 | Change of Control Severance Agreement, dated as of March 10, 2008, between Amtech Systems, Inc. and Bradley Anderson. |
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| 2012-08-09 | 10-Q | 10.3 | AMENDMENT TO EMPLOYMENT AGREEMENT |
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| 2012-08-09 | 10-Q | 10.2 | AMENDMENT TO EMPLOYMENT AGREEMENT |
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| 2012-07-06 | 8-K | 10.1 | EMPLOYMENT AGREEMENT |
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| 2012-02-09 | 10-Q | 10.1 | EMPL AGMT |
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| 2011-11-17 | 10-K | 10.16 | SPA AMENDMENT |
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| 2011-04-26 | 8-K | 10.1 | CHANGE OF CONTROL AND SEVERANCE AGREEMENT |
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| 2010-03-17 | 8-K | 10.4 | AMENDED AND RESTATED CHANGE OF CONTROL AND SEVERANCE AGREEMENT |
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| 2010-03-17 | 8-K | 10.3 | AMENDED AND RESTATED EMPLOYMENT AGREEMENT |
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| 2010-03-17 | 8-K | 10.2 | AMTECH SYSTEMS, INC. 2007 EMPLOYEE STOCK INCENTIVE PLAN |
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| 2010-03-17 | 8-K | 10.1 | AMTECH SYSTEMS, INC. NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN |
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