Entegris, Inc. Subsidiaries
Every subsidiary the company listed in Exhibit 21 of its annual reports, newest list first (18 lists). Names and jurisdictions are as filed.
- 2026-02-11: Subsidiary ATMI International Trading Co. Ltd.; Jurisdiction China.
- 2026-02-11: Subsidiary CMC Materials B.V.; Jurisdiction The Netherlands.
- 2026-02-11: Subsidiary CMC Materials Global Corp.; Jurisdiction Delaware.
- 2026-02-11: Subsidiary CMC Materials LLC; Jurisdiction Delaware.
| Annual report filed | Subsidiary | Jurisdiction |
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| 2026-02-11 | ATMI International Trading Co. Ltd. | China |
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| 2026-02-11 | CMC Materials B.V. | The Netherlands |
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| 2026-02-11 | CMC Materials Global Corp. | Delaware |
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| 2026-02-11 | CMC Materials LLC | Delaware |
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| 2026-02-11 | CMC Materials Shanghai Co., Ltd. | China |
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| 2026-02-11 | CMC Materials Taiwan Co., Ltd. | Taiwan |
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| 2026-02-11 | Entegris Canada Limited | Canada |
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| 2026-02-11 | Digital Specialty Chemicals UK Limited | United Kingdom |
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| 2026-02-11 | Entegris Asia Pte. Ltd. | Singapore |
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| 2026-02-11 | Entegris Ecosys LLC | Delaware |
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| 2026-02-11 | Entegris GmbH | Germany |
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| 2026-02-11 | Entegris GP, Inc. | Delaware |
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| 2026-02-11 | Entegris India private Ltd. | India |
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| 2026-02-11 | Entegris International Holdings II B.V. | The Netherlands |
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| 2026-02-11 | Entegris International Holdings VIII LLC | The Netherlands |
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| 2026-02-11 | Entegris International Holdings, LLC | Delaware |
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| 2026-02-11 | Entegris Ireland Unlimited Company | Ireland |
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| 2026-02-11 | Entegris Israel Ltd. | Israel |
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| 2026-02-11 | Entegris Japan Co. Ltd. | Japan |
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| 2026-02-11 | Entegris Korea Co., Ltd. | South Korea |
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| 2026-02-11 | Entegris Malaysia Sdn. Bhd. | Malaysia |
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| 2026-02-11 | Entegris (Shanghai) Microelectronics Trading Company Ltd. | China |
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| 2026-02-11 | Entegris Pacific Ltd. | Delaware |
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| 2026-02-11 | Entegris Pacific Pte., Ltd | Singapore |
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| 2026-02-11 | Entegris Pacific II Pte., Ltd | Singapore |
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| 2026-02-11 | Entegris Professional Solutions, LLC | Delaware |
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| 2026-02-11 | Entegris SAS | France |
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| 2026-02-11 | Entegris Singapore Pte. Ltd. | Singapore |
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| 2026-02-11 | Entegris Specialty Materials, LLC | Delaware |
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| 2026-02-11 | Entegris Taiwan Holdings, LLC | Delaware |
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| 2026-02-11 | Entegris Taiwan Technologies Co. Ltd. | Taiwan |
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| 2026-02-11 | Hanguk Entegris Co., Ltd | South Korea |
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| 2026-02-11 | Hangzhou Anow Filtration and Materials Co., Ltd. | China |
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| 2026-02-11 | International Test Solutions, LLC | Delaware |
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| 2026-02-11 | KMG-Bernuth, Inc. | Delaware |
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| 2026-02-11 | KMG-Flowchem, Inc. | Delaware |
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| 2026-02-11 | NexPlanar Corporation | Delaware |
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| 2026-02-11 | Nihon Entegris G.K. | Japan |
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| 2026-02-11 | Poco Graphite, Inc. | Delaware |
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