| 2026-05-21 | 8-K | 10.1 | Form of Capped Call Confirmation. |
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| 2026-05-05 | 10-Q | 10.2 | Offer Letter to Shirley Chen, dated May 16, 2025, by and between Shirley Chen and Onto Innovation Inc. |
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| 2026-05-05 | 10-Q | 10.1 | Offer Letter to Ido Dolev, dated October 30, 2024, by and between Ido Dolev and Onto Innovation Inc. |
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| 2026-02-24 | 10-K | 10.8 | Form of Employee Performance Stock Unit Purchase Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2026-02-24 | 10-K | 10.6 | Form of Employee Restricted Stock Unit Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2026-02-24 | 10-K | 10.5 | Form of Executive Performance Stock Unit Grant Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2026-02-24 | 10-K | 10.4 | Form of Executive Restricted Stock Unit Grant Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2025-11-21 | 8-K | 10.2 | Onto Innovation Nonqualified Deferred Compensation Plan Adoption Agreement |
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| 2025-11-21 | 8-K | 10.1 | Onto Innovation Nonqualified Deferred Compensation Plan |
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| 2025-07-11 | 8-K/A | 10.1 | Separation Agreement between Onto Innovation and Mark Slicer, dated July 9, 2025 |
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| 2025-06-16 | 8-K | 10.1 | Employment Agreement between Onto Innovation Inc. and Brian Roberts, effective as of June 16, 2025 |
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| 2025-02-25 | 10-K | 10.16 | Offer Letter to Srinivas Vedula, dated August 30, 2021 |
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| 2025-02-25 | 10-K | 10.15 | Offer Letter to Ramil Yaldaei, dated April 25, 2023, by and between Ramil Yaldaei and Onto Innovation Inc. |
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| 2025-02-25 | 10-K | 10.5 | Form of Executive Performance Stock Unit Grant Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2025-02-25 | 10-K | 10.4 | Form of Executive Restricted Stock Unit Grant Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2025-02-25 | 10-K | 10.3 | Form of Director Stock Option Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2025-02-25 | 10-K | 10.2 | Form of Employee Stock Option Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan, as amended and restated |
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| 2024-08-08 | 10-Q | 10.1 | Onto Innovation Inc. 2020 Stock Plan, as Amended and Restated. |
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| 2024-02-26 | 10-K | 10.7 | Form of Director Restricted Stock Unit Purchase Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan |
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| 2024-02-26 | 10-K | 10.6 | Form of Employee Restricted Stock Unit Agreement for usage under the Onto Innovation Inc. 2020 Stock Plan |
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| 2023-09-15 | 8-K | 10.1 | Employment Agreement, dated as of September 15, 2023, by and between Onto Innovation Inc. and Michael P. Plisinski.* |
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| 2023-02-24 | 10-K | 10.13 | Form of Executive Change in Control Agreement |
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| 2022-11-10 | 10-Q | 10.1 | Executive Change of Control Agreement, dated July 5, 2022, by and between Onto Innovation Inc. and Yoon Ah Oh.+ |
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| 2022-05-17 | 8-K | 10.1 | Offer Letter to Mark Slicer, dated April 1, 2022, by and between Mark Slicer and Onto Innovation Inc. |
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| 2022-05-03 | 10-Q | 10.1 | Offer Letter to Yoon Ah E. Oh, dated October 4, 2021, by and between Yoon Ah E. Oh and Onto Innovation Inc. |
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| 2021-11-04 | 10-Q | 10.1 | Onto Innovation Inc. 2020 Stock Plan form of employee incentive restricted stock unit purchase agreement. |
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| 2021-09-13 | 8-K | 10.1 | Form of Indemnification Agreement |
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| 2021-08-05 | 10-Q | 10.1 | Onto Innovation Inc. 2020 Stock Plan amended form of restricted stock units purchase agreements and performance stock unit purchase agreements. |
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| 2020-08-04 | 10-Q | 10.1 | Onto Innovation Inc. Amended 2020 Employee Stock Purchase Plan |
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| 2020-05-14 | 8-K | 10.1 | Onto Innovation Inc. 2020 Stock Plan and forms of restricted stock units purchase agreements, performance stock unit purchase agreements and stock option agreements |
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| 2019-11-06 | 8-K | 10.1 | Form of Indemnity Agreement |
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| 2019-09-09 | 8-K | 10.1 | Retention Bonus Agreement, dated September 6, 2019, between Nanometrics Incorporated and Greg Swyt. |
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| 2019-07-26 | 8-K | 10.1 | General Severance Benefits and Change in Control Severance Benefits Agreement, dated July 25, 2019, between Nanometrics Incorporated and Greg Swyt. |
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| 2019-05-01 | 10-Q | 10.1 | General Severance Benefits and Change in Control Severance Benefits Agreement between Registrant and James Barnhart, dated March 12, 2018 |
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| 2019-02-25 | 10-K | 10.24 | Stock Purchase Agreement by and among Registrant, 4D Technology Corporation and Dr. James Wyant, James Millerd and Neal Brock, dated October 26, 2018 |
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| 2018-11-06 | 8-K | 10.1 | Retention Bonus Agreement, dated June 25, 2018, between Nanometrics Incorporated and Greg Swyt. |
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| 2018-08-02 | 10-Q | 10.1.5 | Separation Agreement between Registrant and Jonathan Chou, dated June 25, 2018 |
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| 2018-02-26 | 10-K | 10.24 | Relocation Agreement between Registrant and Rollin Kocher, dated December 16, 2016 |
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| 2018-02-26 | 10-K | 10.23 | Retention Bonus Agreement between Registrant and Greg Swyt, dated December 18, 2017 |
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| 2018-02-26 | 10-K | 10.22 | Independent Contractor Agreement between Registrant and S. Mark Borowicz, dated January 8, 2018 |
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| 2018-02-26 | 10-K | 10.21 | Separation Agreement between Registrant and S. Mark Borowicz, dated January 8, 2018 |
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| 2018-02-26 | 10-K | 10.20 | Employment Agreement between the Registrant and Pierre-Yves Lesaicherre, dated November 27, 2017 |
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| 2017-08-11 | 8-K | 10.1 | Transition and Consulting Agreement, dated August 9, 2017, between Nanometrics Incorporated and Timothy J. Stultz, Ph.D. |
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| 2017-03-03 | 10-K | 10.22 | General Severance Benefits and Change in Control Severance Benefits Agreement between Registrant and Rollin Kocher, dated November 10, 2016 |
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| 2016-07-28 | 10-Q | 10.3 | Compensation Arrangements With Non-Employee Directors |
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| 2015-10-30 | 10-Q | 10.2 | Compensation Arrangements With Non-Employee Directors |
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| 2015-10-30 | 10-Q | 10.1 | Change in Control Severance Benefits Agreement |
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| 2015-05-22 | 8-K | 10.4 | General Severance Benefits and Change in Control Severance Benefits Agreement between Registrant and Kevin Heidrich, dated May 19, 2015 |
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| 2015-05-22 | 8-K | 10.3 | General Severance Benefits and Change in Control Severance Benefits Agreement between Registrant and S. Mark Borowicz, dated May 19, 2015 |
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| 2015-05-22 | 8-K | 10.2 | General Severance Benefits and Change in Control Severance Benefits Agreement between Registrant and Jeffrey Andreson, dated May 19, 2015 |
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| 2015-05-22 | 8-K | 10.1 | General Severance Benefits and Change in Control Severance Benefits Agreement between Registrant and Timothy J. Stultz, Ph.D., dated May 19, 2015 |
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| 2015-02-25 | 10-K | 10.16 | Separation Agreement between Registrant and Bruce A. Crawford, dated October 28, 2014 |
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| 2014-10-31 | 10-Q | 10.1 | NANOMETRICS INCORPORATED JEFFREY ANDRESON EMPLOYMENT AGREEMENT |
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| 2014-05-06 | 10-Q | 10.1 | April 30, 2014 |
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| 2014-03-07 | 10-K | 10.26 | Compensation of Non-Employee Directors |
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| 2013-03-12 | 10-K | 10.24 | EXECUTIVE PERFORMANCE BONUS PLAN |
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| 2013-02-20 | 8-K | 10.1 | Form of Indemnity Agreement |
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| 2012-05-09 | 10-Q | 10.1 | FIFTH AMENDMENT TO LOAN AND SECURITY AGREEMENT |
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| 2012-03-14 | 10-K | 10.14 | EMPLOYMENT AGREEMENT BETWEEN REGISTRANT AND NANCY E. EGAN |
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| 2011-05-11 | 10-Q | 10.1 | 2011 EXECUTIVE PERFORMANCE BONUS PLAN |
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| 2011-03-14 | 10-K | 10.21 | EMPLOYMENT AGREEMENT BETWEEN REGISTRANT AND RONALD W. KISLING |
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| 2011-03-14 | 10-K | 10.20 | FORM OF OFFER LETTER TO RONALD W. KISLING |
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| 2010-03-26 | 10-K | 10.27 | AMENDED AND RESTATED EMPLOYMENT AGREEMENT - JAMES P. MONIZ |
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| 2010-03-26 | 10-K | 10.26 | AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - BRUCE CRAWFORD |
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| 2010-03-26 | 10-K | 10.25 | AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - TIMOTHY J. STULTZ, PH.D. |
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| 2010-03-26 | 10-K | 10.24 | 2010 EXECUTIVE PERFORMANCE BONUS PLAN |
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| 2009-08-11 | 10-Q | 10.13 | SUPPLY AGREEMENT BY AND BETWEEN ZYGO CORPORATION |
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| 2009-08-11 | 10-Q | 10.12 | ASSET TRANSFER AGREEMENT BY AND BETWEEN ZYGO CORPORATION |
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| 2009-08-11 | 10-Q | 10.11 | THIRD AMENDMENT TO LOAN AND SECURITY AGREEMENT |
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| 2009-05-12 | 10-Q | 10.10 | SECOND AMENDMENT TO THE ABOVE REFERENCED LOAN AND SECURITY AGREEMENT |
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| 2009-05-12 | 10-Q | 10.9 | FIRST AMENDMENT TO THE ABOVE REFERENCED LOAN AND SECURITY AGREEMENT |
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| 2009-05-12 | 10-Q | 10.4 | AMENDMENT NO. 1 TO THE ABOVE REFERENCED ASSET PURCHASE AGREEMENT |
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| 2009-03-27 | 10-K | 10.18 | NOTICE OF EXTENSION OF THE MATURITY DATE OF ABOVE REFERENCED LOAN AND SECURITY |
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| 2009-03-27 | 10-K | 10.14 | FORM OF EXECUTIVE SEVERANCE AGREEMENT - JAMES P. MONIZ |
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| 2009-03-27 | 10-K | 10.13 | FORM OF OFFER LETTER TO JAMES P. MONIZ |
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